Soft thermal nanoimprint lithography using a nanocomposite mold
- 137 Downloads
Soft nanoimprint lithography has been limited to ultraviolet (UV) curable resists. Here, we introduce a novel approach for soft thermal nanoimprinting. Thisunprecedented combination of the terms “soft” and “thermal” for nanoimprinting became possible thanks to an innovative nanocomposite mold consisting of aflexible polydimethylsiloxane (PDMS) substrate with chemically attached rigidrelief features. We used soft thermal nanoimprinting to produce high-resolution nanopatterns with a sub-100 nm feature size. Furthermore, we demonstrate the applicability of our nanoimprint approach for the nanofabrication of thermallyimprinted nanopatterns on non-planar surfaces such as lenses. Our new nanofabrication strategy paves the way to numerous applications that require the direct fabrication of functional nanostructures on unconventional substrates.
Keywordssoft lithography nanoimprint lithography PDMS non-planar substrates
Unable to display preview. Download preview PDF.
This work was supported by Adelis Foundation for Renewable Energy (No. 2021611) and Israel Science Foundation (No. 1401/15). Viraj Bhingardive thanks the Negev-Tsin Scholarship for its support.
- Richeton, J.; Ahzi, S.; Vecchio, K. S. S.; Jiang, F. C.; Adharapurapu, R. R. Influence of temperature and strain rate on the mechanical behavior of three amorphous polymers: Characterization and modeling of the compressive yield stress. Int. J. Solids Struct. 2006, 43, 2318–2335.CrossRefGoogle Scholar
- Gogolides, E.; Constantoudis, V.; Kokkoris, G.; Kontziampasis, D.; Tsougeni, K.; Boulousis, G.; Vlachopoulou, M.; Tserepi, A. Controlling roughness: From etching to nanotexturing and plasma-directed organization on organic and inorganic materials. J. Phys. D: Appl. Phys. 2011, 44, 174021.CrossRefGoogle Scholar
- Jin, Y.; Feng, J.; Zhang, X.-L.; Bi, Y.-G.; Bai. Y.; Chen, L.; Lan, T.; Liu, Y.-F.; Chen, Q.-D.; Sun, H.-B. Solving effici-ency-stability tradeoff in top-emitting organic light-emitting devices by employing periodically corrugated metallic cathode. Adv. Mater. 2012, 24, 1187–1191.CrossRefGoogle Scholar
- Bi, Y.-G.; Feng, J.; Li, Y.-F.; Zhang, Y.-L.; Liu, Y.-S.; Chen, L.; Liu, Y.-F.; Guo, L.; Wei, S.; Sun, H.-B. Arbitrary shape designable microscale organic light-emitting devices by using femtosecond laser reduced graphene oxide as a patterned electrode. ACS Photonics 2014, 1, 690–695.CrossRefGoogle Scholar
- Juang, Y.-J.; Lee, L. J.; Koelling, K. W. Hot embossing in microfabrication. Part I: Experimental. Polymer Eng. Sci. 2002, 42, 539–550.Google Scholar