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Nano Research

, Volume 11, Issue 5, pp 2705–2714 | Cite as

Soft thermal nanoimprint lithography using a nanocomposite mold

  • Viraj Bhingardive
  • Liran Menahem
  • Mark Schvartzman
Research Article
  • 176 Downloads

Abstract

Soft nanoimprint lithography has been limited to ultraviolet (UV) curable resists. Here, we introduce a novel approach for soft thermal nanoimprinting. Thisunprecedented combination of the terms “soft” and “thermal” for nanoimprinting became possible thanks to an innovative nanocomposite mold consisting of aflexible polydimethylsiloxane (PDMS) substrate with chemically attached rigidrelief features. We used soft thermal nanoimprinting to produce high-resolution nanopatterns with a sub-100 nm feature size. Furthermore, we demonstrate the applicability of our nanoimprint approach for the nanofabrication of thermallyimprinted nanopatterns on non-planar surfaces such as lenses. Our new nanofabrication strategy paves the way to numerous applications that require the direct fabrication of functional nanostructures on unconventional substrates.

Keywords

soft lithography nanoimprint lithography PDMS non-planar substrates 

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Notes

Acknowledgements

This work was supported by Adelis Foundation for Renewable Energy (No. 2021611) and Israel Science Foundation (No. 1401/15). Viraj Bhingardive thanks the Negev-Tsin Scholarship for its support.

Supplementary material

12274_2017_1900_MOESM1_ESM.pdf (1.4 mb)
Soft thermal nanoimprint lithography using a nanocomposite mold

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Copyright information

© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2017

Authors and Affiliations

  • Viraj Bhingardive
    • 1
  • Liran Menahem
    • 1
  • Mark Schvartzman
    • 1
  1. 1.Department of Materials Engineering, Isle Katz Institute of Nanoscale Science and TechnologyBen-Gurion University of the NegevBeer-ShevaIsrael

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