Nano Research

, Volume 9, Issue 8, pp 2510–2519 | Cite as

Improved conductivity and capacitance of interdigital carbon microelectrodes through integration with carbon nanotubes for micro-supercapacitors

  • Yanjuan Yang
  • Liang HeEmail author
  • Chunjuan Tang
  • Ping Hu
  • Xufeng Hong
  • Mengyu Yan
  • Yixiao Dong
  • Xiaocong Tian
  • Qiulong Wei
  • Liqiang MaiEmail author
Research Article


In the last decade, pyrolyzed-carbon-based composites have attracted much attention for their applications in micro-supercapacitors. Although various methods have been investigated to improve the performance of pyrolyzed carbons, such as conductivity, energy storage density and cycling performance, effective methods for the integration and mass-production of pyrolyzed-carbon-based composites on a large scale are lacking. Here, we report the development of an optimized photolithographic technique for the fine micropatterning of photoresist/chitosan-coated carbon nanotube (CHIT-CNT) composite. After subsequent pyrolysis, the fabricated carbon/CHIT-CNT microelectrode-based micro-supercapacitor has a high capacitance (6.09 mF·cm–2) and energy density (4.5 mWh·cm–3) at a scan rate of 10 mV·s–1. Additionally, the micro-supercapacitor has a remarkable long-term cyclability, with 99.9% capacitance retention after 10,000 cyclic voltammetry cycles. This design and microfabrication process allow the application of carbon microelectromechanical system (C-MEMS)-based micro-supercapacitors due to their high potential for enhancing the mechanical and electrochemical performance of micro-supercapacitors.


photolithography supercapacitors pyrolysis microelectromechanical system (MEMS) carbon nanotubes 


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Copyright information

© Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2016

Authors and Affiliations

  • Yanjuan Yang
    • 1
  • Liang He
    • 1
    Email author
  • Chunjuan Tang
    • 1
    • 2
  • Ping Hu
    • 1
  • Xufeng Hong
    • 1
  • Mengyu Yan
    • 1
  • Yixiao Dong
    • 1
  • Xiaocong Tian
    • 1
  • Qiulong Wei
    • 1
  • Liqiang Mai
    • 1
    Email author
  1. 1.State Key Laboratory of Advanced Technology for Materials Synthesis and ProcessingWuhan University of TechnologyWuhanChina
  2. 2.Department of Mathematics and PhysicsLuoyang Institute of Science and TechnologyLuoyangChina

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