Skip to main content

Advertisement

SpringerLink
Log in

Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors

  • Published:
Microgravity Science and Technology Aims and scope Submit manuscript

Abstract

The residual stress information of the precision surface optical device with a metal coating plays an important role in precision optical manufacturing. However, the conventional optical-based non-contact approaches fail to measure the stress less than MPa for such devices, which is required for high precision gravitational waves detection. To solve this problem, we use ellipsometry to detect the stress of a gold coating reflection mirrors as the first trial. Under the pseudo-Brewster angle of the gold, the stress sensitivity for the ellipsometry amplitude ψ reaches 35 kPa. The results suggest the traditional reflection ellipsometry responses at two specific orthogonal directions can be used to measure the strain-induced dielectric function tensor variations under a uniaxial stress situation. A preliminary microscopic model based on Drude model is proposed to derive the relationship between the dielectric function tensor variation of the coating and the uniaxial tensile strain s. Thus, the reflection ellipsometry can be used as an alternative method for the residual stress detection for the high precision planar optical devices with metal coatings under a uniaxial stress condition.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3

Similar content being viewed by others

Data Availability

The data that support the findings of this study are available from the corresponding author upon reasonable request.

References

  • Abbott B.P., Abbott R., Abbott T.D., Abernathy M.R., Acernese F., Ackley K., Adams C., Adams T. et al: Observation of Gravitational Waves from a Binary Black Hole Merger. Phys. Rev. Lett. 116(6), (2016a)

  • Abbott B.P., Abbott R., Abbott T.D., Abernathy M.R., Acernese F., Ackley K., Adams C., Adams T. et al: GW151226: Observation of Gravitational Waves from a 22-Solar-Mass Binary Black Hole Coalescence. Phys. Rev. Lett. 116(24), (2016b)

  • Abbott B.P., Abbott R., Abbott T.D., Acernese F., Ackley K., Adams C., Adams T., Addesso P. et al: GW170817: Observation of Gravitational Waves from a Binary Neutron Star Inspiral. Phys. Rev. Lett. 119(16), (2017)

  • Aspnes, D.E.: Spectroscopic ellipsometry - Past, present, and future. Thin Solid Films 571, 334–344 (2014)

    Article  Google Scholar 

  • Azzam, R.M.A., Bashara, N.M.: Ellipsometry and Polarized Light. Nature 269, 270 (1977)

    Article  Google Scholar 

  • Ben X., Park H.S.: Strain engineering enhancement of surface plasmon polariton propagation lengths for gold nanowires. Appl. Phys. Lett. 102(4), (2013)

  • Brown, D.A., Vahi, K., Taufer, M., Welch, V., Deelman, E.: Reproducing GW150914: The First Observation of Gravitational Waves From a Binary Black Hole Merger. Comput. Sci. Eng. 23(2), 73–82 (2021)

    Article  Google Scholar 

  • Dubert, D., Marín-Genescà, M., Simón, M.J., Gavaldà, J., Ruiz, X.: Complementary Techniques for the Accelerometric Environment Characterization of Thermodiffusion Experiments on the ISS. Microgravity Sci. Tec. 31(5), 673–683 (2019)

    Article  Google Scholar 

  • Groth, B.P., Langan, S.M., Haber, R.A., Mann, A.B.: Relating residual stresses to machining and finishing in silicon carbide. Ceram. Int. 42(1), 799–807 (2016)

    Article  Google Scholar 

  • Gu, G., Song, B.K., Fang, M.S., Hong, Y.L., Chen, X.G., Jiang, H., Ren, W.C., Liu, S.Y.: Layer-dependent dielectric and optical properties of centimeter-scale 2D WSe2: evolution from a single layer to few layers. Nanoscale 11(47), 22762–22771 (2019)

    Article  Google Scholar 

  • Guo E.H., Liu Y.G., Han Y.S., Arola D., Zhang D.S.: Full-field stress determination in photoelasticity with phase shifting technique. Meas. Sci. Technol. 29(4), (2018)

  • Hu, W.R., Wu, Y.L.: The Taiji Program in Space for gravitational wave physics and the nature of gravity. Natl. Sci. Rev. 4(5), 685–686 (2017)

    Article  Google Scholar 

  • Janssen, G.C.A.M., Abdalla, M.M., van Keulen, F., Pujada, B.R., van Venrooy, B.: Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers. Thin Solid Films 517(6), 1858–1867 (2009)

    Article  Google Scholar 

  • Jin, G., Niu, Y.: Protein microarray biosensor based on total internal reflection imaging ellipsometry. Febs J 284, 375–375 (2017)

    Google Scholar 

  • Labat, S., Gergaud, P., Thomas, O., Gilles, B., Marty, A.: Interdependence of elastic strain and segregation in metallic multilayers: An x-ray diffraction study of (111) Au/Ni multilayers. J. Appl. Phys. 87(3), 1172–1181 (2000)

    Article  Google Scholar 

  • Lekner, J.: Optical properties of a uniaxial layer. Pure Appl. Opt. 3, 821–837 (1994)

    Article  Google Scholar 

  • Li, Z.P., Zhang, F.H., Zhang, Y., Luo, X.C.: Experimental investigation on the surface and subsurface damages characteristics and formation mechanisms in ultra-precision grinding of SiC. Int. J. Adv. Manuf. Tech. 92(5–8), 2677–2688 (2017)

    Article  Google Scholar 

  • Liu, H., Luo, Z., Jin, G.: The Development of Phasemeter for Taiji Space Gravitational Wave Detection. Microgravity Sci. Tec. 30(6), 775–781 (2018)

    Article  Google Scholar 

  • Luo Z.R., Guo Z.K., Jin G., Wu Y.L., Hu W.R.: A brief analysis to Taiji: Science and technology. Results Phys. 16, (2020)

  • Luo Z.R., Wang Y., Wu Y.L., Hu W.R., Jin G.: The Taiji program: A concise overview. Prog. Theor. Exp. Phys. 2021(5), (2021)

  • Mendoza B.S., Mochán W.L.: Ab initio theory of the Drude plasma frequency. J. Opt. Soc. Am. B 38(6), (2021)

  • Nakashima S., Mitani T., Ninomiya M., Matsumoto K.: Raman investigation of strain in Si/SiGe heterostructures: Precise determination of the strain-shift coefficient of Si bands. J. Appl. Phys. 99(5), (2006)

  • Niu, Y., Jin, G.: Screening breast cancer by joint detection of tumor marker carbohydrate antigen 15–3 and carbohydrate antigen 72–4 with biosensor based on imaging ellipsometry. Febs J 284, 268–268 (2017)

    Google Scholar 

  • Pflitsch, C., Muhsin, A., Bergmann, U., Atakan, B.: Growth of thin aluminium oxide films on stainless steel by MOCVD at ambient pressure and by using a hot-wall CVD-setup. Surf. Coat. Tech. 201(1–2), 73–81 (2006)

    Article  Google Scholar 

  • Pureza, J.M., Lacerda, M.M., De Oliveira, A.L., Fragalli, J.F., Zanon, R.A.S.: Enhancing accuracy to Stoney equation. Appl. Surf. Sci. 255(12), 6426–6428 (2009)

    Article  Google Scholar 

  • Ramesh, K., Ramakrishnan, V.: Digital photoelasticity of glass: A comprehensive review. Opt. Laser. Eng. 87, 59–74 (2016)

    Article  Google Scholar 

  • Roos, P.A., Stephens, M., Wieman, C.E.: Laser vibrometer based on optical-feedback-induced frequency modulation of a single-mode laser diode. Appl Optics 35(34), 6754–6761 (1996)

    Article  Google Scholar 

  • Shen J., Zhao Y., Liu H., Niu Y., Gao R., Guo T., Zhao D., Luo Z.: Multi-channel Thermal Deformation Interference Measurement of the Telescope Supporting Frame in Spaceborne Gravitational Wave Detection. Microgravity Sci.Tec. 34(4), (2022)

  • Sun, Y.S., Zhu, X.D.: An Ellipsometry-Based Biosensor for Label-Free, Real-Time, and in-Situ Detection of DNA-DNA and DNA-Protein Interactions. Chinese J. Phys. 52(4), 1398–1406 (2014)

    Google Scholar 

  • van der Sneppen, L., Wiskerke, A., Ariese, F., Gooijer, C., Ubachs, W.: Improving the sensitivity of HPLC absorption detection by cavity ring-down spectroscopy in a liquid-only cavity. Anal. Chim. Acta. 558(1–2), 2–6 (2006)

    Article  Google Scholar 

  • Xiao, S.L., Li, B.C., Cui, H., Wang, J.: Sensitive measurement of stress birefringence of fused silica substrates with cavity ring-down technique. Opt. Lett. 43(4), 843–846 (2018)

    Article  Google Scholar 

  • Yang, Y.H., Abelson, J.R.: Spectroscopic ellipsometry of thin films on transparent substrates: A formalism for data interpretation. J. Vac. Sci. Technol. A 13(3), 1145–1149 (1995)

    Article  Google Scholar 

  • Zhang, Y., Wang, W.H., Greer, A.L.: Making metallic glasses plastic by control of residual stress. Nat. Mater. 5(11), 857–860 (2006)

    Article  Google Scholar 

Download references

Acknowledgements

This work was supported by the National Key Research and Development Program of China (2020YFC2201300 and 2021YFC2202902), the Open Fund of State Key Laboratory of Applied Optics (SKLAO2020001A01), National Natural Science Foundation of China (81872584). The authors gratefully acknowledge the funding.

Author information

Author notes

  1. Chenyu Wang and Wei Liu contributed equally to this work.

Authors and Affiliations

  1. NML, Beijing Key Laboratory of Engineered Construction and Mechanobiology, Institute of Mechanics, Chinese Academy of Sciences, Beijing, 100190, China

    Chenyu Wang

  2. School of Engineering Science, University of Chinese Academy of Science, Beijing, 100049, China

    Chenyu Wang

  3. Center for Gravitational Wave Experiment, Institute of Mechanics, Chinese Academy of Science, Beijing, 100190, China

    Wei Liu, Yu Niu & Ziren Luo

  4. State Key Laboratory of Applied Optics, Fine Mechanics and Physics (CIOMP), Changchun Institute of Optics, Chinese Academy of Sciences, Changchun, 130033, China

    Wei Sha

Authors
  1. Chenyu Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Wei Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yu Niu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Wei Sha
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Ziren Luo
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Yu Niu.

Ethics declarations

Conflict of Interest

The authors declare that they have no conflict of interest.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

This article belongs to the Topical Collection: Research Pioneer and Leader of Microgravity Science in China: Dedicated to the 85th Birthday of Academician Wen-Rui Hu

Guest Editors: Jian-Fu Zhao, Kai Li

Supplementary Information

Below is the link to the electronic supplementary material.

Supplementary file1 (DOCX 84 KB)

Rights and permissions

Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Wang, C., Liu, W., Niu, Y. et al. Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors. Microgravity Sci. Technol. 34, 98 (2022). https://doi.org/10.1007/s12217-022-10017-w

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s12217-022-10017-w

Keywords

Search

Navigation