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Nozzle-based precision patterning with micro-/nano fluidics integrated cantilevers

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Abstract

As the requirements of micro-/nano printing technologies are continuously increasing, direct writing technologies on a submicron scale are drawing attention. One of the promising methods is a nozzle-based precision patterning with atomic force microscopy (AFM), which has the advantages of high position controllability including nozzle-to-substrate distance feedback under a nanometer scale. It uses a fluidic channel and a dispensing nozzle integrated with a cantilever structure for deflection monitoring. In this paper, we introduce micro/nanofluidics integrated cantilevers for nozzle-based precision patterning in several considerations: 1) numerous fabrication strategies for nozzle-integrated fluidic cantilevers; 2) methods for liquid transport; 3) methods for pattern formation; and 4) applications with various printing materials.

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Acknowledgments

This research was supported by the National Research Foundation of Korea (NRF) grants (Ministry of Science and ICT) (NRF-2020R1A2C3004885 and NRF-2020R1A4A2002728), South Korea. All reprinted figures are under Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/).

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Authors and Affiliations

  1. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Korea

    Juhee Ko, Nada Ben Fredj, Rafita Erli Adhawiyah & Jungchul Lee

  2. Center for Extreme Thermal Physics and Manufacturing, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Korea

    Juhee Ko, Nada Ben Fredj, Rafita Erli Adhawiyah & Jungchul Lee

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  1. Juhee Ko
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  2. Nada Ben Fredj
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  3. Rafita Erli Adhawiyah
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  4. Jungchul Lee
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Correspondence to Jungchul Lee.

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Juhee Ko received B.S. degree in Mechanical Engineering from Sogang University in 2019 and the M.S. degree in Mechanical Engineering from the Korea Advanced Institute of Science and Technology (KAIST) in 2021. She is currently enrolled in the Ph.D. program in Mechanical Engineering at KAIST. Her research interests include the design and fabrication of MEMS transducers and multimodal sensing with microfluidic resonators.

Jungchul Lee is an Associate Professor in the Department of Mechanical Engineering at Korea Advanced Institute of Science and Technology. He received the B.S. and M.S. degrees in the Mechanical Engineering from Seoul National University, Seoul, Korea in 2001 and 2003, respectively. He received the Ph.D. degree in the Mechanical Engineering from Georgia Institute of Technology in 2007. During 2007–2008, he worked as a postdoctoral research associate in the Mechanical Science and Engineering at the University of Illinois Urbana-Champaign. During 2008–2010, he worked as a postdoctoral research associate in the Department of Biological Engineering at Massachusetts Institute of Technology. Before joining the KAIST, he was an Associate Professor in the Department of Mechanical Engineering at Sogang University. His research interests include large-scale batch fabrication of functional nanostructures based on silicon self-assembly, hydrogel based micro-/nanoelectromechanical systems (MEMS/NEMS), and materials and processing for flexible, stretchable, and wearable devices. He is currently focusing on nanoscale 3D printing, multifunctional atomic force microscopy, and single molecule force/mass spectroscopy. He serves as a convenor of International Electrotechnical Commission (IEC) SC47E/WG1 (Semiconductor sensors) and an assistant secretary of IEC TC124 (Wearable electronic devices and technologies). He is a member of the Korean Society of Mechanical Engineers (KSME) and a member of the Society of Micro Nano Systems. He is the recipient of the Academic Award from the Society of Micro Nano Systems in 2016, the IEC 1906 award in 2016 and the Academic Award from the Korean Society of Mechanical Engineers Micro/Nano division in 2019. He organized the 15th International Workshop on Nanomechanical Sensing (NMC 2018) in 2018.

Nada Ben Fredj received a B.S. degree in Mechanical Engineering at the University of British Columbia in 2021 and is currently pursuing a Master’s degree at the Korea Advanced Institute of Science and Technology (KAIST) in the Mechanical Engineering Department. Her research interests included MEMS and nanotechnology for biomedical applications, as well as origami-based 4D printing.

Rafita Erli Adhawiyah received B.S. degree in Biomedical Engineering from Bandung Institute of Technology, Indonesia in 2021. She is currently enrolled in the Master’s program in Mechanical Engineering at KAIST. Her research interests include design and fabrication in microfluidic.

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Ko, J., Fredj, N.B., Adhawiyah, R.E. et al. Nozzle-based precision patterning with micro-/nano fluidics integrated cantilevers. J Mech Sci Technol 37, 887–900 (2023). https://doi.org/10.1007/s12206-023-0130-5

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