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A framework for eigenvalue-based topology optimization of torsional resonant microscanner to improve dynamic stability

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Abstract

The micro-electro-mechanical system (MEMS) technology has led to improvements in the manufacturability and scalability of the semiconductor-based sensors and actuators. This study proposes a framework for topology optimization to improve the dynamic stability of a resonant MEMS scanner for a light detection and ranging (LiDAR) system installed on an autonomous vehicle. The microscanner must have excellent dynamic stiffness and rigidity for in-plane disturbances because the vehicle system is subjected to several types of disturbances owing to road harshness and power train vibration. This paper is the first one to apply the topology optimization method to the design of torsional spring of the microscanner to maximize the lateral yawing mode frequency, which might degrade stable operation. The optimization was constrained to the mode frequencies for the torsional and the two bending modes, similar to the reference model. The proposed framework can facilitate the systematical design of a torsional resonant microscanner that satisfies frequency requirements with improved dynamic stability for in-plane disturbance.

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Abbreviations

M :

Mass matrix of a finite element analysis

C :

Damping matrix of a finite element analysis

K :

Stiffness matrix of a finite element analysis

γ :

Topology design variable used in this work

ω n :

Natural frequency of the nth vibrating mode

ψ n :

Mode shape of the nth vibrating mode

f Lat, Yaw :

Natural frequency due to lateral yawing deformation

\(f_{1^{st},torsional}\) :

1st natural frequency due to the torsional deformation

\(f_{2^{nd},bending}\) :

2nd mode frequency due to the bending deformation

\(f_{3^{rd},bending}\) :

3rd mode frequency due to the bending deformation

volfrac :

Volume fraction which means the design constraint of the topology optimization

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Acknowledgments

This study was mainly supported by National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. 2021R1A2C2013259) and by WeMEMS research project funded by the Technology Development Program of MSS (S3039876).

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Authors and Affiliations

  1. School of Mechanical Engineering, Gwangju Institute of Science and Technology, 123 Cheomdangwagiro, Buk-gu, Gwangju, Korea

    Hyun-Guk Kim, Semyung Wang & Jong-Hyun Lee

  2. Research and Development Section, WeMEMS Co., 621-1, Dasan Bldg., 123 Cheomdangwagi-ro, Buk-gu, Gwangju, Korea

    Sin-Ho Kim & Jong-Hyun Lee

Authors
  1. Hyun-Guk Kim
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  2. Sin-Ho Kim
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  3. Semyung Wang
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  4. Jong-Hyun Lee
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Corresponding author

Correspondence to Jong-Hyun Lee.

Additional information

Hyun-Guk Kim received his Ph.D. in Mechanical Engineering from Gwangju Institute of Science and Technology. Currently, he is working in Satellite System Team 1 in Hanwha System as a senior researcher. His research interests include design optimization of noise insulation structure and vibration isolator, vibro-acoustic analysis/experiment, and satellite system.

Sin-Ho Kim received his B.S. in Mechanical Engineering at Kumoh National Institute of Technology in 2018, and his M.S. at Gwangju Institute of Science and Technology in 2020. He is currently working on development of MEMS scanning mirrors at WeMEMS Co. His research interests include MEMS energy harvester, MEMS scanning mirror, and system control.

Semyung Wang is a Professor of Mechanical Engineering, Gwangju Institute of Science and Technology, Gwangju, Korea. He received his Ph.D. in Mechanical Engineering from University of Iowa. His research interests include multidisciplinary design optimization sound and vibration control (sound focusing, virtual sound barrier), and the design of electromagnetic devices.

Jong-Hyun Lee received the B.S. in Mechanical Design from Seoul National University, South Korea, in 1981, and M.S. and Ph.D. from KAIST in 1983 and 1986, respectively. He is currently a Professor of Mechanical Engineering and CEO of WeMEMS Co. His research interests include optical MEMS, micro sensors/actuators, and biomedical micro/nano devices.

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Kim, HG., Kim, SH., Wang, S. et al. A framework for eigenvalue-based topology optimization of torsional resonant microscanner to improve dynamic stability. J Mech Sci Technol 37, 25–30 (2023). https://doi.org/10.1007/s12206-022-1204-5

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  • DOI: https://doi.org/10.1007/s12206-022-1204-5

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