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Design of a compact long-stroke high-precision rigid-flexible coupling motion stage driven by linear motor

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Abstract

This paper proposes a long-stroke rigid-flexible coupling motion stage (RFCMS) that employs flexure hinges to compensate the friction dead zone through elastic deformation. Specifically, based on the need for a motion stage with a compact structure, this paper proposes a new rigid-flexible coupling structure (RFCS) design with a horizontally installed linear motor and asymmetric flexure hinges. Further, end leaf springs are introduced to enhance the stiffness in the non-motion direction. In addition, the nonlinear interior-point optimization method is used to obtain the optimal structural parameters of the flexure hinges for higher deformation uniformity. To verify the effectiveness of the proposed design, a motion stage benchmarked with Aerotech’s PRO190LM (stroke, 500 mm) is developed, which realizes bidirectional repeatability (BR) of ±0.25 µm. The BR is improved by 37.5 %. Moreover, the deformation uniformity of the stage is ±3.7 %, which proves that the proposed RFCMS can achieve high deformation uniformity and high precision.

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References

  1. R.-H. M. Schmidt, Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry, Phil. Trans. R. Soc., A, 370(1973) (2012) 3950–3972.

    Article  Google Scholar 

  2. S. Kang, M. G. Lee and Y.-M. Choi, Six degrees-of-freedom direct-driven nanopositioning stage using crab-leg flexures, IEEE/ASME Trans. Mechatron, 25(2) (2020) 513–525.

    Article  Google Scholar 

  3. F. X. Chen et al., A PZT actuated 6-DOF positioning system for space optics alignment, IEEE/ASME Trans. Mechatron, 24(6) (2019) 2827–2838.

    Article  Google Scholar 

  4. K. Inoue, T. Tanikawa and T. Arai, Micro-manipulation system with a two-fingered micro-hand and its potential application in bioscience, Journal of Biotechnology, 133(2) (2008) 219–224.

    Article  Google Scholar 

  5. R. Lin et al., Design of A flexure-based mixed-kinematic XY high-precision positioning platform with large range, Mechanism and Machine Theory, 142 (2019) 103609.

    Article  Google Scholar 

  6. M. Torralba et al., Design optimization for the measurement accuracy improvement of a large range nanopositioning stage, Sensors, 16(1) (2016) 84.

    Article  MathSciNet  Google Scholar 

  7. Y. Tian et al., Three flexure hinges for compliant mechanism designs based on dimensionless graph analysis, Precision Engineering, 34(1) (2010) 92–100.

    Article  Google Scholar 

  8. S. Iqbal and A. Malik, A review on MEMS based micro displacement amplification mechanisms, Sensors and Actuators A: Physical, 300 (2019) 111666.

    Article  Google Scholar 

  9. B. J. Kenton and K. K. Leang, Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner, IEEE/ASME Trans. Mechatron., 17(2) (2012) 356–369.

    Article  Google Scholar 

  10. M. Torralba et al., Large range nanopositioning stage design: A three-layer and two-stage platform, Measurement, 89 (2016) 55–71.

    Article  Google Scholar 

  11. L. Clark et al., Topology optimisation of bridge input structures with maximal amplification for design of flexure mechanisms, Mechanism and Machine Theory, 122 (2018) 113–131.

    Article  Google Scholar 

  12. J.-J. Kim et al., A millimeter-range flexure-based nano-positioning stage using a self-guided displacement amplification mechanism, Mechanism and Machine Theory, 50 (2012) 109–120.

    Article  Google Scholar 

  13. K.-B. Choi, J. J. Lee and S. Hata, A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel, Sensors and Actuators A: Physical, 161(1–2) (2010) 173–181.

    Article  Google Scholar 

  14. S. B. Choi et al., A magnification device for precision mechanisms featuring piezoactuators and flexure hinges: Design and experimental validation, Mechanism and Machine Theory, 42(9) (2007) 1184–1198.

    Article  MATH  Google Scholar 

  15. Q. S. Xu, Design and development of a compact flexure-based XY precision positioning system with centimeter range, IEEE Trans. Ind. Electron., 61(2) (2014) 893–903.

    Article  Google Scholar 

  16. J. K. Shang et al., A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism, Review of Scientific Instruments, 86(9) (2015) 095001.

    Article  Google Scholar 

  17. Q. S. Xu, Design, testing and precision control of a novel long-stroke flexure micropositioning system, Mechanism and Machine Theory, 70 (2013) 209–224.

    Article  Google Scholar 

  18. L. Y. Zhang et al., Implementation and experiment of an active vibration reduction strategy for macro-micro positioning system, Precision Engineering, 51 (2018) 319–330.

    Article  Google Scholar 

  19. Y.-T. Liu, T. Higuchi and R.-F. Fung, A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuator—part II: theoretical analysis, Precision Engineering, 27(1) (2003) 22–31.

    Article  Google Scholar 

  20. L. Y. Zhang et al., A rapid vibration reduction method for macro-micro composite precision positioning stage, IEEE Trans. Ind. Electron., 64(1) (2017) 401–411.

    Article  Google Scholar 

  21. Q. S. Xu, Design and development of a flexure-based dual-stage nanopositioning system with minimum interference behavior, IEEE Trans. Automat. Sci. Eng., 9(3) (2012) 554–563.

    Article  Google Scholar 

  22. L. Y. Zhang, J. Gao and H. Tang, Development and modeling of a macro/micro composite positioning system for microelectronics manufacturing, Key Engineering Materials, 679 (2016) 135–142.

    Article  Google Scholar 

  23. L. Y. Zhang, J. Gao and X. Chen, A rapid dynamic positioning method for settling time reduction through a macro-micro composite stage with high positioning accuracy, IEEE Trans. Ind. Electron., 65(6) (2018) 4849–4860.

    Article  Google Scholar 

  24. H. Shinno, H. Yoshioka and H. Sawano, A newly developed long range positioning table system with a sub-nanometer resolution, CIRP Annals, 60(1) (2011) 403–406.

    Article  Google Scholar 

  25. X. Dong, D. Yoon and C. E. Okwudire, A novel approach for mitigating the effects of pre-rolling/pre-sliding friction on the settling time of rolling bearing nanopositioning stages using high frequency vibration, Precision Engineering, 47 (2017) 375–388.

    Article  Google Scholar 

  26. Y. Altintas et al., Machine tool feed drives, CIRP Annals, 60(2) (2011) 779–796.

    Article  Google Scholar 

  27. Aerotech, Inc., PRO190LM Hardware Manual, Available: https://www.aerotech.com/wp-content/uploads/2021/01/PRO190LM.pdf.

  28. H. Shinno et al., X-Y-θ nano-positioning table system for a mother machine, CIRP Annals, 53(1) (2004) 337–340.

    Article  Google Scholar 

  29. R. Q. Li et al., Analytical solutions for nonlinear deflections of corner-fillet leaf-springs, Mechanism and Machine Theory, 157 (2021) 104182.

    Article  Google Scholar 

  30. Y. S. Du, P. C. Dang and T. M. Li, Design and testing of a novel two-axial flexure-based vibration stage, J. Vib. Eng. Technol., 10(2) (2022) 499–509.

    Article  Google Scholar 

  31. R. Q. Li et al., A compliant guiding mechanism utilizing orthogonally oriented flexures with enhanced stiffness in degrees-of-constraint, Mechanism and Machine Theory, 167 (2022) 104555.

    Article  Google Scholar 

Download references

Acknowledgments

The work is supported in part by a grant from National Natural Science Foundation of China (Grant Nos. 51875108, 51905107); in part by the Natural Science Foundation of Guangdong Province under Grant 2019A1515012004.

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Authors and Affiliations

  1. State Key Laboratory for Precision Electronics Manufacturing Technology and Equipment, School of Mechanical Engineering, Guangdong University of Technology, Guangzhou CO, 510006, China

    Liyun Su, Guanxin Huang, Ruirui Huang & Zhijun Yang

  2. Foshan Huadao Ultra Precision Co., Ltd, Guangzhou, 51006, China

    Zhijun Yang

Authors
  1. Liyun Su
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  2. Guanxin Huang
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  3. Ruirui Huang
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  4. Zhijun Yang
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Corresponding author

Correspondence to Zhijun Yang.

Additional information

Liyun Su is currently pursuing the doctoral program in mechanical engineering of Guangdong University of Technology, Guangzhou, China. Her research interests include design and optimization of ultra-precision motion stage, and semiconductor manufacturing techniques.

Guanxin Huang is currently an Associate Professor with the School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China. His research direction is the optimal design of microelectronic manufacturing equipment.

Ruirui Huang is currently pursuing the M.S. degree with the School of Electromechanical Engineering. His research interests include precision motion control, flexure-based compliant mechanisms, and precision manufacturing equipment applications.

Zhijun Yang is currently a Professor with the School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, China. His research interests include motion control, semiconductor manufacturing equipment, and the compliant mechanism.

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Su, L., Huang, G., Huang, R. et al. Design of a compact long-stroke high-precision rigid-flexible coupling motion stage driven by linear motor. J Mech Sci Technol 36, 5859–5870 (2022). https://doi.org/10.1007/s12206-022-1104-8

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  • DOI: https://doi.org/10.1007/s12206-022-1104-8

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