Abstract
Modern sensors are becoming increasingly small in size while their sensitivity requirements remain relatively strict, to the point that the processing technology and test technology are highly difficult and costly. This paper proposes a micro-resonant biosensor with adjustable natural frequency. A positive feedback signal with a phase difference of 180 degrees is used to reduce the equivalent mass of the resonator, yielding an ultrahigh resonant frequency. The biosensor is formed by a coating bovine blood solution on the surface of the resonator of a cantilever sensor. The instantaneous frequency equation of the biosensor is established using a coupling dynamic calculation. The changes in instantaneous frequency during hemoglobin oxygen absorption and deoxygenation, are then measured. The proposed millimeter micro-resonant biosensor system measures the molecular weight of a single oxygen molecule quality at 5.7619×10−23 g, only deviating by 8.306 % from the theoretical value. Finally, the potential of the micron scale sensor is deeply taped.
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Acknowledgements
This project is supported by Natural Science Foundation of Hebei Province, China (E2021402024); Scientific research project of colleges and universities in Hebei Province, China (QN2022156); National Natural Science Foundation of China (52005148).
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The authors declare that there are no conflicts of interest regarding the publication of this paper.
Xiaorui Fu is a lecturer in College of Mechanical and Equipment Engineering, Hebei University of Engineering, China. He received his Ph.D. in Mechanical Engineering from Yanshan University, China. His primary research interests are in the area of electromechanical coupled dynamics of the micro sensors system.
Ming Zhang is a Lecturer and Master Supervisor in School of Mechanical and Equipment Engineering, Hebei University of Engineering, China. He received his Ph.D. in Mechanical Design and Theory from Yanshan University, China. His research interests are mechanical system dynamics.
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Fu, X., Zhang, M., Hou, D. et al. Molecular-resolution micro-resonant biosensor with adjustable natural frequency. J Mech Sci Technol 36, 5191–5199 (2022). https://doi.org/10.1007/s12206-022-0931-y
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DOI: https://doi.org/10.1007/s12206-022-0931-y