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Experimental study on ultrasonic-assisted grinding of micro-structured surface on silicon carbide using small diameter grinding wheel

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Abstract

As an effective machining method for hard and brittle materials, ultrasonic-assisted grinding (UAG) was employed to manufacture microstructures on SiC in this study. The kinematic characteristics of abrasive grains during machining were analyzed first. After that, the influence of machining parameters on the shape accuracy and surface quality was revealed experimentally. The results demonstrate that the feed rate and ultrasonic amplitude have significant effects on machining quality. The introduction of ultrasonic vibration can effectively reduce the grinding force and improve the surface finish quality. For the micro cylinder array, by selecting the ultrasonic amplitude rationally, the peak-to-valley (PV) value and surface roughness can be decreased by 15.8% and 27.5%. Furthermore, microcracks, dominated by lateral cracks and fractures were found on the sub-surface. Compared with conventional grinding, UAG can reduce the subsurface damage (SSD) depth and gain a more uniform distribution of damage regions along the machined surface.

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Abbreviations

R :

Grinding wheel radius

ω :

Angular frequency of the spindle

A :

Vibration amplitude of the workpiece

f :

Vibration frequency of the workpiece

f e :

Tool feed rate

b :

Constant value

M :

Particle size of grinding tool

Vg :

Volume fraction of abrasive particles

θ :

The angle between the abrasive grain movement direction and the feed direction

F :

A unit vector parallel to the feed direction

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Acknowledgments

The present work was financially sponsored by the Fundamental Research Funds for the Central Universities in China (Grant Number: WUT:2020III033GX).

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Authors and Affiliations

  1. School of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan, 430070, China

    Hongbo Li, Tao Chen, Zhenyan Duan, Yiwen Zhang & Haotian Li

  2. Hubei Digital Manufacturing Key Laboratory, Wuhan University of Technology, Wuhan, 430070, China

    Hongbo Li, Tao Chen, Zhenyan Duan, Yiwen Zhang & Haotian Li

Authors
  1. Hongbo Li
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  2. Tao Chen
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  3. Zhenyan Duan
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  4. Yiwen Zhang
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Corresponding author

Correspondence to Tao Chen.

Additional information

Hongbo Li is a Ph.D. candidate at Wuhan University of Technology. He received his B.S. in Mechanical Engineering from Henan University of Science and Technology, Luoyang, China. His research interest is ultrasonic-assisted grinding of hard and brittle materials.

Tao Chen is a Professor of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan, China. He received his Ph.D. in Mechanical Engineering from Huazhong University of Science and Technology. His research interests include ultrasonic-assisted machining of hard and brittle materials and fault diagnosis of fuel-cell.

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Li, H., Chen, T., Duan, Z. et al. Experimental study on ultrasonic-assisted grinding of micro-structured surface on silicon carbide using small diameter grinding wheel. J Mech Sci Technol 36, 3631–3642 (2022). https://doi.org/10.1007/s12206-022-0638-0

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  • DOI: https://doi.org/10.1007/s12206-022-0638-0

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