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Numerical evaluation on surface temperature uniformity of multi-zone and single-zone ceramic heaters with the electrostatic chuck

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Abstract

The present study aims to numerically analyze the surface temperature uniformity of the multi-zone/single-zone ceramic heaters because the temperature uniformity becomes important in the semiconductor process, in close association with increasing productivity, depending on the power of heaters and the coolant temperature. The extensive simulations were conducted by the commercial code of ANSYS Fluent (V.2020.R2). It was found that the maximum temperature differences between the center of the puck and edge were estimated to be 32 K and 25 K for the circle and ring-type single-zone heaters, respectively. Also, the temperature difference between the center of the puck and the edge increased with the power of the ceramic heater. When using the multi-zone heater, a temperature difference was predicted to be 4.73 K, showing a smaller variation in space. It is concluded that the multi-zone heater can yield a more uniform temperature field in the radial direction.

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Acknowledgments

This work was supported by the Chung-Ang University Graduate Research Scholarship in 2018 and the Technology Innovation Program (20011259, Development of Electrostatic Ceramic Heater including Multi-Zone Capable of Precision Temperature Control) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea).

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Authors and Affiliations

  1. School of Mechanical Engineering, Chung-Ang University, Seoul, 06974, Korea

    Hyung Ju Lee & Seong Hyuk Lee

  2. Department of Intelligent Energy and Industry, Chung-Ang University, Seoul, 06974, Korea

    Seong Hyuk Lee

Authors
  1. Hyung Ju Lee
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  2. Seong Hyuk Lee
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Correspondence to Seong Hyuk Lee.

Additional information

Hyung Ju Lee received his B.S. and M.S. degrees from Chung-Ang University. He is currently a Ph.D. candidate in School of Mechanical Engineering at the Chung-Ang University. His research interests are visualization of phase change phenomenon and computational fluid dynamics.

Seong Hyuk Lee received his B.S., M.S., and Ph.D. in Mechanical Engineering Department from Chung-Ang University in Korea. Now, He is a Professor of Mechanical Engineering Department at Chung-Ang University. He has various research fields in heat and mass transfer: evaporation/condensation heat transfer, SPR visualization, and computational physics.

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Lee, H.J., Lee, S.H. Numerical evaluation on surface temperature uniformity of multi-zone and single-zone ceramic heaters with the electrostatic chuck. J Mech Sci Technol 35, 3763–3770 (2021). https://doi.org/10.1007/s12206-021-0745-3

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  • DOI: https://doi.org/10.1007/s12206-021-0745-3

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