Abstract
This paper presents the coupling stiffness modeling of an XY flexure-based manipulator. Stiffness/compliance equations for compliant mechanisms are first obtained. According to a simplified spring model, the input stiffness and coupling stiffness of the proposed manipulator consisting of outer and inner kinematic chains are then derived. This simplified spring model is composed of four parallel chains, such as the left, lower, upper and right parallel chain. Subsequently, the external force/moment and the output displacement of the manipulator are analyzed by using finite element analysis (FEA). Finally, a prototype of the manipulator is fabricated. Its motion range and the corresponding cross-coupling displacements are measured, and thus the cross-coupling ratios can be derived. It demonstrates that the manipulator possesses good decoupling characteristic, and the proposed theoretical model is reasonable and accurate.
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References
G. B. Hao and J. J. Yu, Design, modelling and analysis of a completely-decoupled XY compliant parallel manipulator, Mech. Mach. Theory, 102 (2016) 179–195.
Y. K. Yong, T. F. Lu and D. C. Handley, Review of circular flexure hinge design equations and derivation of empirical formulations, Precis. Eng., 32 (2008) 63–70.
A. T. Elgammal, M. Fanni and A. M. Mohamed, Design and analysis of a novel 3d decoupled manipulator based on compliant pantograph for micromanipulation, J. Intell. Robot. Syst., 87 (2017) 43–57.
G. Schitter, K. J. Astrom, B. E. DeMartini, P. J. Thurner, K. L. Turner and P. K. Hansma, Design and modeling of a highspeed AFM-scanner, IEEE. Trans. Control. Syst. Technol., 15 (2007) 906–915.
C. Liang, F. Wang, B. Shi, Z. Huo, Y. Tian and D. Zhang, Design and control of a novel asymmetrical piezoelectric actuated microgripper for micromanipulation, Sens. Actuator. A-Phys., 269 (2018) 227–237.
K. B. Choi and D. H. Kim, Monolithic parallel linear compliant mechanism for two axes ultraprecision linear motion, Rev. Sci. Instrum., 77 (2006) 065106.
H. Huang, H. Zhao, Z. Yang, J. Mi, Z. Fan, S. Wan and Z. Ma, A novel driving principle by means of the parasitic motion of the microgripper and its preliminary application in the design of the linear actuator, Rev. Sci. Instrum., 83 (2012) 055002.
Y. D. Qin, B. Shirinzadeh, Y. Tian, D. Zhang and U. Bhagat, Design and computational optimization of a decoupled 2-DOF monolithic mechanism, IEEE Transactions on Mechatronics, 19 (2013) 872–881.
I. Ivanov and B. Corves, Fatigue testing of flexure hinges for the purpose of the development of a high-precision micro manipulator, Mech. Sci., 5 (2014) 59–66.
P. Wang and Q. S. Xu, Design of a flexure-based constantforce XY precision positioning stage, Mech. Mach. Theory., 108 (2017) 1–13.
Y. L. Yang, Y. D. Wei, J. Q. Lou and X. W. Zhao, Nonlinear dynamic analysis and optimal trajectory planning of a highspeed macro-micro manipulator, J. Sound. Vibr., 405 (2017) 112–132.
K. Chandrasekaran and A. Thondiyath, Design of a two degree-of-freedom compliant tool tip for a handheld powered surgical tool, J. Med. Devices, 11 (2017) 014502.
G. B. Hao, Towards the design of monolithic decoupled XYZ compliant parallel mechanisms for multi-function applications, Mech. Sci., 4 (2013) 291–302.
J. Pinskier, B. Shirinzadeh, L. Clark and Y. D. Qin, Design, development and analysis of a haptic-enabled modular flexurebased manipulator, Mechatronics, 40 (2016) 156–166.
Y. Li, Z. Wu and X. Zhao, Optimal design and control strategy of a novel 2-DOF micromanipulator, Int. J. Adv. Robot. Syst., 10 (2013) 162.
S. C. Huang and T. P. Dao, Design and computational optimization of a flexure-based XY positioning platform using FEAbased response surface methodology, Int. J. Precis. Eng. Manuf., 17 (2016) 1035–1048.
J. J. Yu, Y. Xie, Z. Li and G. B. Hao, Design and experimental testing of an improved large-range decoupled XY compliant parallel micromanipulator, J. of Mechanisms and Robotics, 7 (2015) 044503.
Q. S. Xu, Design and development of a compact flexurebased XY precision positioning system with centimeter range, IEEE Trans. Ind. Electron., 61 (2013) 893–903.
Y. Li and Q. Xu, A novel piezoactuated XY stage with parallel, decoupled, and stacked flexure structure for micro-/nanopositioning, IEEE. Trans. Ind. Electron., 58 (2010) 3601–3615.
L. J. Lai and Z. N. Zhu, Design, modeling and testing of a novel flexure-based displacement amplification mechanism, Sens. Actuator A-Phys., 266 (2017) 122–129.
B. J. Kenton and K. K. Leang, Design and control of a threeaxis serial-kinematic high-bandwidth nanopositioner, IEEE/ASME Transactions on Mechatronics, 17 (2011) 356–369.
Y. Qin, B. Shirinzadeh and Y. Tian, Design issues in a decoupled XY stage: Static and dynamics modeling, hysteresis compensation, and tracking control, Sens. Actuator. A-Phys., 194 (2013) 95–105.
Y. Li, J. Huang and H. Tang, A compliant parallel XY micromotion stage with complete kinematic decoupling, IEEE Trans. Autom. Sci. Eng., 9 (2012) 538–553.
Y. S Du, T. M. Li and Y. Jiang, Design and analysis of a 2-degree-of-freedom flexure-based micro-motion stage, Adv. Mech. Eng., 8 (2016) 1687814016638301.
Acknowledgements
This work was supported by Beijing Natural Science Foundation (3194044), and Beijing Postdoctoral Research Foundation of China (2017-ZZ-034).
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Recommended by Editor Chang-Soo Han
Yunsong Du is a lecturer in the College of Mechanical Engineering and Applied Electronics Technology at Beijing University of Technology. He earned his Ph.D. in 2017 from Tsinghua University. His research interests lie in flexurebased compliant mechanisms.
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Du, Y., Li, T. Output decoupling modeling of a XY flexure-based compliant manipulator. J Mech Sci Technol 34, 269–277 (2020). https://doi.org/10.1007/s12206-019-1228-7
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DOI: https://doi.org/10.1007/s12206-019-1228-7