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A novel inverse modeling control for piezo positioning stage

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Abstract

This paper focuses on the application of a novel inverse nonlinear autoregressive with exogenous input (NARX) structure and a fuzzy inference system on position control of a piezo positioning stage (PPS) system. The highly relationship between input voltage and output displacement is thoroughly modeled by using the inverse fuzzy NARX model-based identification process with the experiment training data. The unknown parameters of the proposed NARX fuzzy model was obtained base on a hybridization between backtracking search algorithm and gradient descent technique. A combination between fuzzy propositional–integral–derivative controller and inverse modeling feedforward controller was then applied to control PPS with several challenged working condition. The results show efficiency of the proposed method for the PPS system in terms of high tracking precision and excellent dynamic performance.

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Author information

Authors and Affiliations

  1. School of Mechanical and Automotive Engineering, University of Ulsan, Ulsan, Korea

    To Xuan Dinh & Kyoung Kwan Ahn

  2. T-Robotics Co., Ltd., Gyeonggi-do, Korea

    Nguyen Phi Luan

Authors
  1. To Xuan Dinh
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  2. Nguyen Phi Luan
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  3. Kyoung Kwan Ahn
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Corresponding author

Correspondence to Kyoung Kwan Ahn.

Additional information

Recommended by Associate Editor Yang Shi

To Xuan Dinh received the B.S. degree from the Department of Mechanical Engineering, Le Quy Don Technical University, Hanoi, Vietnam, in 2013. He is currently studying Integrated Course at University of Ulsan. His research interests focus on intelligent control, nonlinear control, optimization algorithm, design and control of smart actuators/materials, drone control and application.

Nguyen Phi Luan received his B.S. from Ho Chi Minh City University of Technology, Viet Nam, in 2010, and Ph.D. from University of Ulsan, Korea, in 2014. From 2014 to 2016, he was a researcher at University of Ulsan. He is currently an assistant manager at TRobotics Co., Ltd. Korea. His research interests include robotics, vision based automated system, automated guided vehicle (AGV).

Kyoung Kwan Ahn received the B.S. degree from the Department of Mechanical Engineering, Seoul National University, Seoul, Korea, in 1990, the M.Sc. degree in mechanical engineering from the Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea, in 1992, and the Ph.D. degree from the Tokyo Institute of Technology, Tokyo, Japan, in 1999. He is currently a Professor in the School of Mechanical Engineering, University of Ulsan, Ulsan, Korea. His research interests include design and control of smart actuators using smart materials, fluid power control, and active damping control. Prof. Ahn is a member of the American Society of Mechanical Engineers (ASME), Society of Instrument and Control Engineers (SICE), Robotics Society of Japan (RSJ), Japan Society of Mechanical Engineers (JSME), Korean Society of Mechanical Engineers (KSME), Korean Society of Precision Engineers (KSPE), Korean Society of Automotive Engineers (KSAE), Korea Fluid Power Systems Society (KFPS), and Japan Fluid Power System Society (JFPS).

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Dinh, T.X., Luan, N.P. & Ahn, K.K. A novel inverse modeling control for piezo positioning stage. J Mech Sci Technol 32, 5875–5888 (2018). https://doi.org/10.1007/s12206-018-1136-2

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  • DOI: https://doi.org/10.1007/s12206-018-1136-2

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