Journal of Mechanical Science and Technology

, Volume 31, Issue 4, pp 1851–1859 | Cite as

Comparison between wire mesh and plate electrodes during wide-pattern machining on invar fine sheet using through-mask electrochemical micromachining

  • Kwang-ho Chun
  • Da-som Jin
  • Seong-hyun Kim
  • Eun-sang Lee


Many research on the fabrication of Organic light emitting diodes (OLED) shadow masks with high resolution have been carried out because of the development of the smart-display industry. It is the parts of display panel which has millions of micro holes on invar (Fe-Ni) fine sheet. Various techniques such as laser machining, chemical etching and Electrochemical micro-machining (EMM) are used to produce micro-hole arrays. In this study, Through-mask electrochemical machining (TMEMM) combine with portion of photolithography process was applied to fabricate micro-hole arrays on invar fine sheet. The sheet was coated with dry film photoresist. Two types of electrode, plate and mesh, was used to compare the influence of electrode type. The sheet was coated with dry film photoresist with micro- sized through holes. The results were compared in regard to uniformity and taper angle. Compared with the plate electrode, the mesh electrode has better uniformity and taper angle which is important criteria of OLED shadow mask. These results could be used to improve TMEMM for invar fine sheet when it is applied to fabricate micro-hole arrays and help to obtain optical uniformity and desired taper angles.


Electrochemical machinability Inner electrolyte flow Mesh electrode Micro hole arrays Widely patterned invar fine sheet Pulsed electrochemical machining (PECM) 


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Copyright information

© The Korean Society of Mechanical Engineers and Springer-Verlag Berlin Heidelberg 2017

Authors and Affiliations

  • Kwang-ho Chun
    • 1
  • Da-som Jin
    • 1
  • Seong-hyun Kim
    • 1
  • Eun-sang Lee
    • 2
  1. 1.School of Mechanical EngineeringInha UniversityIncheonKorea
  2. 2.Department of Mechanical EngineeringInha UniversityIncheonKorea

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