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Using DQM method on residual vibration analysis of an electrostatically actuated microswitch structure

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Abstract

Using the Differential quadrature method (DQM) on Residual vibration analysis of an Electrostatically actuated microswitch structure is focused to study in this work. The application of external voltage between an electrode and a microbeam results in microbeam vibration during the transient period before the beam reaches its permanent position. The lifetime of a microswitch or a modulator is dependent on the number of switching-cycles it performs; therefore severe residual vibrations may reduce the lifetime of the micro-actuator and introduce operating delays. Consequently, understanding and controlling the residual vibration in a micro-actuator is paramount. In this study, the effects of design parameters on the dynamic responses of a microswitch were formulated and considered. The models proposed use the DQM combined with the Wilson- q method, to treat the nonlinear transient problem of microswitches, and simultaneously consider the effects of position-dependent electrostatic force, mechanical restoring force, and squeeze-film damping. Additionally, the effects of the electrode in various positions on the residual vibration of the microbeam were explored. Variations of residual vibrations with variously shaped beams and electrodes were simulated and studied to control the settling time of the micro-actuator. Analysis results indicate that the residual vibration of microswitches can be markedly changed by effects of the shape and tip thickness of beam, and length and position of electrode of an electrostatically actuated microswitch structure system.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Cheng Shiu University, Kaohsiung, 83347, Taiwan

    Bo-Wun Huang

  2. Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung, 80424, Taiwan

    Jao-Hwa Kuang & Chao-Jung Chen

  3. Quanta Computer Inc., Taipei, Taiwan

    Chao-Jung Chen

  4. Department of Leisure and Sports Management, Cheng Shiu University, Kaohsiung, Taiwan

    Jung-Ge Tseng

Authors
  1. Bo-Wun Huang
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  2. Jao-Hwa Kuang
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  3. Chao-Jung Chen
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  4. Jung-Ge Tseng
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Corresponding author

Correspondence to Bo-Wun Huang.

Additional information

Recommended by Associate Editor Ohseop Song

Bo-Wun Huang currently is the Dean of Reserch and Development Affairs and Professor of the Department of Mechanical Engineering, Cheng Shiu University, Taiwan. His primary research focuses in the area of fracture, FEM, noise and vibration and micro machining. He serves an Editor or Editorial Board Member for seventeen journals, such as Structural Engineering and Mechanics, An International Journal, International Journal of Mechanical Engineering and so on, and received Outstanding talents Award of the Taiwan Ministry of Science and Technology from 2010–2016.

Jao-Hwa Kuang is a Professor of the Department of Mechanical and Elctromechanical Engineering, National Sun Yat-Sen University, Taiwan. His primary research focuses in the area of Dyanmics & mechanism, FEM, noise and vibration. He is a member of CSSV, CSME and IFToM and serves as an Editor of Journal of Chinese Society of Mechanical Engineers.

Chao-Jung Chen received the the Ph.D. degree in mechanical and electromechanical engineering from the National Sun Yat-sen University, Kaoshiung, Taiwan, in 2004. He currently is a Director of Research and Development, Quanta Computer Inc., Taiwan.

Jung-Ge Tseng graduated in Shipbuilding Engineering from Chung Cheng Institute of Technology, Taiwan, in 1980, completed his M.S. in Mechanical Engineering from University of Washington, Seattle, U.S.A., in 1987, and Ph.D. in Mechanical Engineering in Carnegie Mellon University, U.S.A., in 1996. Presently he is an Associate Professor in Department of Leisure and Sports Management at Cheng Shiu University, Kaohsiung, Taiwan. He is now particularly interested in the field of biomechanics in sports, fluid structure interaction and finite element analysis.

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Huang, BW., Kuang, JH., Chen, CJ. et al. Using DQM method on residual vibration analysis of an electrostatically actuated microswitch structure. J Mech Sci Technol 30, 3499–3506 (2016). https://doi.org/10.1007/s12206-016-0709-1

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  • DOI: https://doi.org/10.1007/s12206-016-0709-1

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