Skip to main content
SpringerLink
Log in

A compact and fast nano-stylus profiling head for optical instruments

  • Published:
Journal of Mechanical Science and Technology Aims and scope Submit manuscript

Abstract

The current study developed a compact and high-speed stylus-profiling head with overall dimensions of 34.3 × 32.5 × 33.7 mm3. A simple linear flexure leaf spring was used as a precision guide method for the profiling head along a vertical axis and for the assembly of an infrared light-emitting diode. A position-sensitive photo-diode was used for as a simple sensing method. The static and dynamic forces, which can be controlled electronically using a vertical solenoid, were in the range of 10−2 N to 10−5 N. Displacement was in the range of 80 nm to 87.2 μm, making it adequate for the precise surface measurements of hard materials. The sensor resolution was less than 10 nm. The designed profiling head had a moving mass of 1 mg and speed within 100 Hz.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. G. Chetwynd, X. Liu and S. T. Smith, A controlled-force stylus displacement probe, Precision Engineering, 19(2) (1996) 105–111.

    Article  Google Scholar 

  2. L. P. Howard and S. T. Smith, A metrological constant force stylus profiler, Review of Scientific Instruments, 65(4) (1992) 892–902.

    Article  Google Scholar 

  3. K. C. Fan, C. Y. Lin and L. H. Shyu, The development of a low-cost focusing probe for profile measurement, Measurement Science and Technology, 11 (2000) N1–N7.

    Article  Google Scholar 

  4. D. G. Chetwynd, X. Liu and S. T. Smith, Signal fidelity and tracking force in stylus profilometry, Int. J. Mach. Tools Manufactu, 32(1) (1992) 239–245.

    Article  Google Scholar 

  5. S. T. Smith, Flexure: Elements of elastic mechanics, Second Ed. Taylor & Francis Company, London, England (2003).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. NEMS and Bio Team, National Nano-fab Center, Daejeon, Korea

    Jae-Hong Park

  2. Go-Ryo FND Co., LTD, Hwaseong, Gyeonggi, Korea

    Yang-Keun Jo

  3. School of Biotechnology, Yeungnam University, Gyeongsan-si, 712-749, Korea

    Jihoe Kim

  4. School of Mechanical Engineering, Yeungnam University, Gyeongsan-si, 712-749, Korea

    Dong-Yeon Lee

Authors
  1. Jae-Hong Park
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yang-Keun Jo
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Jihoe Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Dong-Yeon Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Dong-Yeon Lee.

Additional information

Recommended by Guest Editor Dong-Ho Bae

Dong-Yeon Lee is a professor at the School of Mechanical Engineering, Yeungnam University, South Korea. He received his Ph.D from KAIST. His main research interests are nanomachine design and electric vehicles.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Park, JH., Jo, YK., Kim, J. et al. A compact and fast nano-stylus profiling head for optical instruments. J Mech Sci Technol 26, 2077–2080 (2012). https://doi.org/10.1007/s12206-012-5018-0

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12206-012-5018-0

Keywords

Search

Navigation