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Three-dimensional fuzzy influence analysis of fitting algorithms on integrated chip topographic modeling

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Abstract

In inspecting the detailed performance results of surface precision modeling in different external parameter conditions, the integrated chip surfaces should be evaluated and assessed during topographic spatial modeling processes. The application of surface-fitting algorithms exerts a considerable influence on topographic mathematical features. The influence mechanisms caused by different surface-fitting algorithms on the integrated chip surface facilitate the quantitative analysis of different external parameter conditions. By extracting the coordinate information from the selected physical control points and using a set of precise spatial coordinate measuring apparatus, several typical surface-fitting algorithms are used for constructing micro-topographic models with the obtained point cloud. In computing for the newly proposed mathematical features on surface models, we construct the fuzzy evaluating data sequence and present a new three-dimensional fuzzy quantitative evaluating method. Through this method, the value variation tendencies of topographic features can be clearly quantified. The fuzzy influence discipline among different surface-fitting algorithms, topography spatial features, and the external science parameter conditions can be analyzed quantitatively and in detail. In addition, quantitative analysis can provide final conclusions on the inherent influence mechanism and internal mathematical relation in the performance results of different surface-fitting algorithms, topographic spatial features, and their scientific parameter conditions in the case of surface micro modeling. The performance inspection of surface precision modeling will be facilitated and optimized as a new research idea for micro-surface reconstruction that will be monitored in a modeling process.

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References

  1. Y. Maeda, H. Uchida and A. Yamamoto, Measurement of the geometric features of a cutting tool edge with the aid of a digital processing technique, Precision Engineering, 11(6) (1989) 165–171.

    Article  MATH  Google Scholar 

  2. C. -C. Leung, K.-S. Chan, H.-M. Chan and W.-K. Tsui, A new approach for enhancement applied to low-contrast-lowillumination IC and documents, Pattern Recognition Letters, 6(4) (2005) 769–778.

    Article  Google Scholar 

  3. H. Liu, W. Zhou, Q. Kuang, L. Cao and B. Gao, Defect detection of IC wafer based on two-dimension wavelet transform, Microelectronics Journal, 41(5) (2010) 171–177.

    Article  Google Scholar 

  4. B. Wagner, H. J. Quenzer, W. Henke, W. Hoppe and W. Pilz, Micro-fabrication of complex surface topographies using fuzzy-tone lithography, Sensors and Actuators A: Physical, 6(4) (1995) 89–94.

    Article  Google Scholar 

  5. T. Y. Lin, K. L. Davison and W. S. Leong, Surface topographical characterization of silver-plated film on the wedge bond ability of leaded IC packages, Microelectronics Reliability, 3(9) (2003) 803–809.

    Article  Google Scholar 

  6. S. Bae, K. Schiemann, W. Mertin, E. Kubalek and M. Maywald, A new bi-functional topography and current probe for scanning force microscope testing of integrated circuits, Microelectronics Reliability, 39(4) (1999) 975–980.

    Article  Google Scholar 

  7. J.-D. Lee, Wavelet transform for 3-D reconstruction from series sectional medicals, Mathematical and Computer Modeling, 30(10) (1999) 1–13.

    Article  MATH  Google Scholar 

  8. I. Sherrington and G. W. Howarth, Approximate numerical models of 3-D surface topography generated using sparse frequency domain descriptions, International Journal of Machine Tools and Manufacture, 38(4) (1998) 599–606.

    Article  Google Scholar 

  9. B. -G. Rosén, R. Ohlsson and J. Westberg, Interactive surface modeling, an implementation of an expert system for specification of surface roughness and topography, International Journal of Machine Tools and Manufacture, 35(11) (1995) 317–324.

    Article  Google Scholar 

  10. J. Xie, F. Wei, J. H. Zheng, J. Tamaki and A. Kubo, 3D laser investigation on micron-scale grain protrusion topography of truncated diamond grinding wheel for precision grinding performance, International Journal of Machine Tools and Manufacture, 51(12) (2011) 411–419.

    Article  Google Scholar 

  11. L. De Chiffre, H. N. Hansen and N. Kofod, Surface topography characterization using an atomic force microscope mounted on a coordinate measuring machine, CIRP Annals — Manufacturing Technology, 48(9) (1999) 463–466.

    Article  Google Scholar 

  12. I. Sherrington and G. W. Howarth, Approximate numerical models of 3-d surface topography generated using sparse frequency domain descriptions, International Journal of Machine Tools and Manufacture, 38(5) (1998) 599–606.

    Article  Google Scholar 

  13. C. M. B. Nobre, R. A. Braga Jr, A. G. Costa, R. R. Cardoso, W. S. da Silva and T. Sáfadi, Bio-speckle, Laser spectral analysis under the inertia moment, entropy and crossspectrum methods, Optics Communications, 282(2) (2009) 2236–2242.

    Article  Google Scholar 

  14. D. Erdogmus, E. G. Larsson, R. Yan and J. C. Principe, Jeffrey R. Fitzsimmons, Measuring the signal-to-noise ratio in magnetic resonance imaging: a caveat, Signal Processing, 4(3) (2004) 1035–1040.

    Article  Google Scholar 

  15. J. Hua, L. Meng, Z. Xu and G. Li, An adaptive signal-tonoise ratio estimator in mobile communication channels, Digital Signal Processing, 20(7) (2010) 692–698.

    Article  Google Scholar 

  16. Y. Z. Chen, Complex potentials and singular integral equation for curve crack problem in anti-plane elasticity, International Journal of Engineering Science, 38(8) (2000) 565–574.

    Article  MathSciNet  MATH  Google Scholar 

  17. M. Griebel and G. Zumbusch, Parallel adaptive subspace correction schemes with applications to elasticity, Computer Methods in Applied Mechanics and Engineering, 184(3) (2000) 303–332.

    Article  MathSciNet  MATH  Google Scholar 

  18. J. L. C. Mission and H.-J. Kim, Design charts for elastic pile shortening in the equivalent top-download-settlement curve from a bidirectional load test, Computers and Geotechnics, 8(7) (2011) 167–177.

    Article  Google Scholar 

  19. M. Manera and A. Marzullo, Modelling the load curve of aggregate electricity consumption using principal components, Environmental Modeling & Software, 20(8) (2005) 1389–1400.

    Article  Google Scholar 

  20. T. P. Vo and J. Lee, Interaction curves for vibration and buckling of thin-walled composite box beams under axial loads and end moments, Applied Mathematical Modeling, 34(7) (2010) 3142–3157.

    Article  MathSciNet  MATH  Google Scholar 

  21. G. A. Papakostas, Y. S. Boutalis, D. A. Karras and B. G. Mertzios, Pattern classification by using improved wavelet Compressed Zernike Moments, Applied Mathematics and Computation, 36(10) (2009) 162–176.

    Article  MathSciNet  Google Scholar 

  22. K. N. Ngan and S. B. Kang, Geometric modeling of IC die bonds for inspection, Pattern Recognition Letters, 10(3) (1989) 47–52.

    Article  MATH  Google Scholar 

  23. C. -S. Lin, J. T. Huang, T.-C. Wei, M.-S. Yeh and D.-C. Chen, High speed and high accuracy inspection of in-tray laser IC marking using line scan CCD with a new calibration model, Optics & Laser Technology, 43(3) (2011) 218–225.

    Article  Google Scholar 

  24. K. C. Stevens and T. J. Wilson, Locating IC defects in process monitors and test structures using optical beam induced current, Microelectronic Engineering, 12(5) (1990) 397–404.

    Article  Google Scholar 

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Authors and Affiliations

  1. School of Mechanical & Electrical Engineering, Guangzhou University, 510006, Guangzhou, China

    Zhongwei Liang & Yijun Wang

  2. School of Mechanical & Automotive Engineering, South China University of Technology, 510640, Guangzhou, China

    Bangyan Ye

  3. Department of Information Engineering, Indian Institute of Technology (IIT), Kanpur, India

    Richard Kars Brauwer

Authors
  1. Zhongwei Liang
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  2. Bangyan Ye
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  3. Yijun Wang
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  4. Richard Kars Brauwer
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Corresponding author

Correspondence to Zhongwei Liang.

Additional information

Recommended by Editor Maenghyo Cho

Zhongwei Liang is a Ph.D and Associate Professor. He received his M.S. and Ph.D degrees in mechanical engineering in 2005 and 2008, respectively. Currently, he is an Associate Professor and Master’s Supervisor at the School of Mechanical Engineering. His major research interests include image processing, reverse engineering, turbulence analysis, free curves, and surfaces reconstruction, among others. He is an author and coauthor of more than 20 international journal papers and 20 papers published after the proceedings of international conferences. Dr. Liang is a senior member of CMES, CIE, CCF, and ACM.

Bangyan Ye is a Ph.D. and Professor. His major research interests include advanced manufacturing technology, computer science, and engineering, among others.

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Liang, Z., Ye, B., Wang, Y. et al. Three-dimensional fuzzy influence analysis of fitting algorithms on integrated chip topographic modeling. J Mech Sci Technol 26, 3177–3191 (2012). https://doi.org/10.1007/s12206-012-0832-6

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  • DOI: https://doi.org/10.1007/s12206-012-0832-6

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