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Residual strain measurement of piezoelectric multilayers by spiral structure

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Abstract

A new structure is described to measure the residual strain of thin film of piezoelectric multi-layers. The spiral shaped structure consists of the four fixed-guided beams. Piezoelectric multilayers consisting of SiOx/Pt/PZT/Pt on SiNx substrate are used to evaluate the suggested structure. Finite element analysis predicts that the out-of-plane displacement of the spiral structure by residual stress depends linearly on the beam length, but there is little difference depending on the beam width. PZT is prepared by sol-gel method and multilayered spiral structures are released by microfabrication technique. Sensitivity analysis of the spiral structure with various layer stack shows that the high displacement of piezoelectric multilayers can be decreased by the application of SiOx layer with compressive stress over the piezoelectric multilayers.

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Authors and Affiliations

  1. Department of Mechatronics Engineering, Tongmyung University, Busan, Korea

    Jun-Hyub Park

  2. Department of Mechanical Engineering, Korea University, Seoul, Korea

    Young-Ryun Oh, Hyun-Suk Nam & Yun-Jae Kim

  3. MEMS Business Division, National Nanofab Center, Daejeon, Korea

    Tae-Hyun Kim & Hee-Yeoun Kim

Authors
  1. Jun-Hyub Park
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  2. Young-Ryun Oh
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  3. Hyun-Suk Nam
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  4. Yun-Jae Kim
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  5. Tae-Hyun Kim
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  6. Hee-Yeoun Kim
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Corresponding author

Correspondence to Hee-Yeoun Kim.

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Recommended by Guest Editor Dong-Ho Bae

Jun-Hyub Park received the B.S. degree from Korea University, Seoul, Korea, in 1985, the M.S. and Ph.D. in Mechanical Engineering from Korea Advanced Institute of Science and Technology, Daejeon, Korea, in 1987, 1995, respectively. He works in the department of Mechatronics Engineering, TongMyong University as professor. His primary research interest is in reliability and fatigue life prediction of MEMS devices and mechanical structures.

Young-Ryun Oh received a B.S. in Material Science and Engineering from Korea University in 2010. He is currently in the doctoral course of the Graduate school of Korea University, Korea. His research interests are micro-scale material behavior and hydrogen embrittlement.

Hyun-Suk Nam received his B.S in Mechanical Engineering from Korea University, Korea in 2011. He is currently in the master’s course in mechanical engineering, Korea University. His research interests include measuring of thin film material properties and fracture mechanism.

Yun-Jae Kim is a professor of the Mechanical Engineering Department, Korea University. He received his Ph.D in 1993 from Massachusetts Institute of Technology, USA. His research interests are in structural integrity and reliability.

Tae Hyun Kim received the B. Sc in Electronic Physics from Hankuk University of Foreign Studies. He developed the microbolometer at OCAS Co. during 2008∼2010. Currently working on design, simulation and testing branch of MEMS Business Division, National NanoFab Center (NNFC).

Hee Yeoun Kim received M.S. and Ph.D in Material Science and Engineering from Korea Advanced Institute of Science and Technology. He developed the microoptical modulator at Samsung Electromechanics Co. during 2006–2008. Currently NEMS Team Leader at National NanoFab Center. His research interests are in MOEMS and micromechanics.

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Park, JH., Oh, YR., Nam, HS. et al. Residual strain measurement of piezoelectric multilayers by spiral structure. J Mech Sci Technol 26, 2139–2142 (2012). https://doi.org/10.1007/s12206-012-0531-3

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  • DOI: https://doi.org/10.1007/s12206-012-0531-3

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