Skip to main content
SpringerLink
Log in

Iterative tuning of decoupling controller for 3-DOF precision motion stage

  • Published:
Journal of Mechanical Science and Technology Aims and scope Submit manuscript

Abstract

A practical iterative tuning algorithm of a decoupling controller is presented to eliminate intrinsic coupling among 3-DOF precision motion stage. General decoupling control cannot eliminate coupling completely, which will prevent the enhancement of control accuracy in high-precision motion system. The proposed algorithm can be used to tune the parameters of a decoupling controller iteratively through minimizing a quadratic cost function of the tracking error in non-movement direction when the stage moves in one direction. The tuning algorithm addressed for the motion stage needs only measurement signals in an actual motion system rather than a detailed model of the stage. The proposed algorithm is demonstrated by experimental results. It can be applied further in other multi-DOF motion systems.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. K. S. Chen, D. L. Trumper and S. T. Smith, Design and control for an electromagnetically driven X-Y-θ stage, Precision Engineering, 26(4) (2002) 355–369.

    Article  MATH  Google Scholar 

  2. J. Lei, X. Luo, X. D. Chen and T. H. Yan, Modeling and analysis of a 3-DOF Lorentz-force-driven planar motion stage, Mechatronics, 20(5) (2010) 553–565.

    Article  Google Scholar 

  3. S. Dejima, W. Gao, H. Shimizu, S. Kiyono and Y. Tomita, Precision positioning of a five degree-of-freedom planar motion stage, Mechatronics, 15(8) (2005) 969–987.

    Article  Google Scholar 

  4. Y. M. Li and Q. S. Xu, A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nanomanipulation, IEEE Transaction on Automation Science and Engineering, 8(2) (2011) 265–279.

    Article  Google Scholar 

  5. H. Wang and X. M. Zhang, Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage, Mechanism and Machine Theory, 43(4) (2008) 400–410.

    Article  MATH  Google Scholar 

  6. I. Garciaherreros, X. Kestelyn, J. Gomand and P. J. Barre, Model-based control of a dual-drive H-type gantry stage on a decoupling base, IEEE International Conference on Industrial Technology, Valparaiso, Chile (2010) 547–552.

  7. H. Hialmarsson, M. Gevers, S. Gunnarsson and O. Lequin, Iterative feedback tuning: theory and applications, IEEE Control Systems, 18(4) (1998) 26–41.

    Article  Google Scholar 

  8. K. Hamamotoa, T. Fukudab and T. Sugie, Iterative feedback tuning of controllers for a two-mass-spring system with friction, Control Engineering Practice, 11(9) (2002) 1061–1068.

    Article  Google Scholar 

  9. A. Karimi, L. Miskovic and D. Bonvin, Iterative correlation-based controller tuning with application to a magnetic suspension system, Control Engineering Practice, 11(9) (2003) 1069–1078.

    Article  Google Scholar 

  10. H. Stearns, S. Mishra and M. Tomizuka, Iterative tuning of feedforward controller with force ripple compensation for wafer stage, 10th IEEE International Workshop on Advanced Motion Control, Trento, Italy (2008) 234–239.

  11. S. H. Meulen, R. L. Tousain and O. H. Bosgra, Fixed structure feedforward controller design exploiting iterative trials: application to a wafer stage and a desktop printer, Journal of Dynamic Systems, Measurement, and Control, 130(5) (2008) 051006-1–16.

    Google Scholar 

  12. M. Heertjes, D. Hennekens and M. Steinbuch, MIMO feed-forward design in wafer scanners using a gradient approximation-based algorithm, Control Engineering Practice, 18(5) (2010) 495–506.

    Article  Google Scholar 

  13. M. Heertjes, D. Hennekens, A. Engelen and M. Steinbuch, Dynamic decoupling in motion systems using a gradient approximation-based algorithm, Joint 48th IEEE Conference on Decision and Control and 28th Chinese Control Conference, Shanghai, P.R. China (2009) 5086–5091.

  14. P. Lambrechts, M. Boerlage and M. Steinbuch, Trajectory planning and feedforward design for electromechanical motion systems, Control Engineering Practice, 13(2) (2005) 145–157.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. School of Energy Power, and Mechanical Engineering, North China Electric Power University, Beijing, 102206, China

    Wei Teng, Qingfeng Gao & Xin Wu

  2. State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, Hubei, 430074, China

    Haihua Mu

Authors
  1. Wei Teng
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Qingfeng Gao
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Xin Wu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Haihua Mu
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Wei Teng.

Additional information

This paper was recommended for publication in revised form by Associate Editor Yang Shi

Wei Teng received his Ph.D degree in the School of Mechanical Science and Engineering at Huazhong University of Science and Technology in 2009. Dr. Teng joined the School of Energy, Power and Mechanical Engineering at North China Electric Power University as an Assistant Professor in 2009. His major research interest is dynamic analysis, measurement and control of mechatronic systems.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Teng, W., Gao, Q., Wu, X. et al. Iterative tuning of decoupling controller for 3-DOF precision motion stage. J Mech Sci Technol 26, 635–641 (2012). https://doi.org/10.1007/s12206-011-1104-6

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12206-011-1104-6

Keywords

Search

Navigation