Abstract
In the present study, an electrode layout of pyroelectric sensors is developed to improve electric signals. Voltage responsivity is a main target to enhance the performance of pyroelectric sensors. A partially covered, top electrode has been proven to effectively increase the voltage responsivity of pyroelectric sensors. In the experimental results, the proposed electrode layout with an array type in ZnO pyroelectric sensors possessed higher voltage signals, about 3.6 times that of a fully covered type, and about 2 times that of a partially covered type. Moreover, a finite element model is used to explore the temperature variation rate in ZnO pyroelectric sensors for both the fully covered and the partially covered electrodes. In the simulation results, the partially covered electrode can indeed improve the temperature variation rate in the ZnO layer.
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This paper was recommended for publication in revised form by Associate Editor Yong-Tae Kim
Chun-Ching Hsiao is an assistant professor of the Department of Mechanical Design Engineering at the National Formosa University, Taiwan. His researches focus on pyroelectric sensors, flexible devices, thermoelectric generators, and residual stress of thin film.
Shih-Yuan Yu is a graduate student of the Department of Mechanical Design Engineering at the National Formosa University, Taiwan. His research interests are computer simulation and fabrication on ZnO pyroelectric sensors.
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Hsiao, CC., Yu, SY. Electrode layout of ZnO pyroelectric sensors. J Mech Sci Technol 25, 2835–2842 (2011). https://doi.org/10.1007/s12206-011-0808-y
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DOI: https://doi.org/10.1007/s12206-011-0808-y