Hybrid process of fabricating high-quality micro wine-glass fused silica resonators
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A new hybrid method, which combines improved glass-blown technology with wet etching, is reported to fabricate micro wine-glass resonators with high-quality fused silica. The optimum placement is compared to achieve the resonators with good shell shape. The typical shell diameter is about 4mm and its thickness covers from dozens to hundreds of micrometers. The etching rates in corrosion solutions with different ratios and at different thicknesses of hemispherical shells are studied. We also conclude how to precisely control the thickness. The corrosion solutions with different ratios of HF solution to NH4F solution make the spherical shells rougher in different degrees. The best roughness is 0.581 nm in the 1: 8 ratio corrosion solution while the original roughness is 0.537 nm. This fact shows that the resonator remains atomically smooth surface. Based on the glassblowing spherical fused silica structure, the thickness of the resonator is effectively controlled by buffered oxide etch (BOE) technology according to the measured etching rate. The measured resonant frequency of the hemispherical shell at ambient pressure and room temperature is 1.75 kHz of rocking mode which is close to the simulated frequency. Using such a low-cost hybrid approach, we can fabricate high-quality microscale resonators in batch.
Keywordshemispherical resonator wet etching glassblowing fused silica
CLC numberV 241.5
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The authors would like to thank the cleanroom staff at Center for Advanced Electronic Materials and Devices (AEMD) and Engineering Mechanics Experiment Center.
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