Hybrid process of fabricating high-quality micro wine-glass fused silica resonators

  • Yaliang Xing (刑亚亮)
  • Weiping Zhang (张卫平)
  • Jian Tang (唐 健)
  • Dianjun Sun (孙殿竣)
  • Zhaoyang Liu (刘朝阳)
  • Bin Ou (欧 彬)


A new hybrid method, which combines improved glass-blown technology with wet etching, is reported to fabricate micro wine-glass resonators with high-quality fused silica. The optimum placement is compared to achieve the resonators with good shell shape. The typical shell diameter is about 4mm and its thickness covers from dozens to hundreds of micrometers. The etching rates in corrosion solutions with different ratios and at different thicknesses of hemispherical shells are studied. We also conclude how to precisely control the thickness. The corrosion solutions with different ratios of HF solution to NH4F solution make the spherical shells rougher in different degrees. The best roughness is 0.581 nm in the 1: 8 ratio corrosion solution while the original roughness is 0.537 nm. This fact shows that the resonator remains atomically smooth surface. Based on the glassblowing spherical fused silica structure, the thickness of the resonator is effectively controlled by buffered oxide etch (BOE) technology according to the measured etching rate. The measured resonant frequency of the hemispherical shell at ambient pressure and room temperature is 1.75 kHz of rocking mode which is close to the simulated frequency. Using such a low-cost hybrid approach, we can fabricate high-quality microscale resonators in batch.


hemispherical resonator wet etching glassblowing fused silica 

CLC number

V 241.5 


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The authors would like to thank the cleanroom staff at Center for Advanced Electronic Materials and Devices (AEMD) and Engineering Mechanics Experiment Center.


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Copyright information

© Shanghai Jiaotong University and Springer-Verlag Berlin Heidelberg 2017

Authors and Affiliations

  • Yaliang Xing (刑亚亮)
    • 1
  • Weiping Zhang (张卫平)
    • 1
  • Jian Tang (唐 健)
    • 1
  • Dianjun Sun (孙殿竣)
    • 1
  • Zhaoyang Liu (刘朝阳)
    • 1
  • Bin Ou (欧 彬)
    • 1
  1. 1.National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of Ministry of Education and Shanghai Key Laboratory of Navigation and Location-Based Services, Department of Micro/Nano Electronics, School of Electronic Information and Electrical EngineeringShanghai Jiao Tong UniversityShanghaiChina

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