Abstract
During the past decades, atomically thin, twodimensional (2D) layered materials have attracted tremendous research interest on both fundamental properties and practical applications because of their extraordinary mechanical, thermal, electrical and optical properties, which are distinct from their counterparts in the bulk format. Various fabrication methods, such as soft-lithography, screen-printing, colloidal-templating and chemical/ dry etching have been developed to fabricate micro/ nanostructures in 2D materials. Direct laser fabrication with the advantages of unique three-dimensional (3D) processing capability, arbitrary-shape designability and high fabrication accuracy up to tens of nanometers, which is far beyond the optical diffraction limit, has been widely studied and applied in the fabrication of various micro/ nanostructures of 2D materials for functional devices. This timely review summarizes the laser-matter interaction on 2D materials and the significant advances on laser-assisted 2D materials fabrication toward diverse functional photonics, optoelectronics, and electrochemical energy storage devices. The perspectives and challenges in designing and improving laser fabricated 2D materials devices are discussed as well.
Similar content being viewed by others
References
Zhang H. Ultrathin two-dimensional nanomaterials. ACS Nano, 2015, 9(10): 9451–9469
Ponraj J S, Xu Z Q, Dhanabalan S C, Mu H, Wang Y, Yuan J, Li P, Thakur S, Ashrafi M, Mccoubrey K, Zhang Y, Li S, Zhang H, Bao Q. Photonics and optoelectronics of two-dimensional materials beyond graphene. Nanotechnology, 2016, 27(46): 462001
Xia F N, Wang H, Xiao D, Dubey M, Ramasubramaniam A. Twodimensional material nanophotonics. Nature Photonics, 2014, 8(12): 899–907
Brar V W, Koltonow A R, Huang J X. New discoveries and opportunities from two-dimensional Materials. ACS Photonics, 2017, 4(3): 407–411
Novoselov K S, Fal′ko V I, Colombo L, Gellert P R, Schwab M G, Kim K. A roadmap for graphene. Nature, 2012, 490(7419): 192–200
Zhang Y B, Rubio A, Lay G L. Emergent elemental twodimensional materials beyond graphene. Journal of Physics. D, Applied Physics, 2017, 50(5): 053004
Bhimanapati G R, Lin Z, Meunier V, Jung Y, Cha J, Das S, Xiao D, Son Y, Strano MS, Cooper V R, Liang L, Louie S G, Ringe E, Zhou W, Kim S S, Naik R R, Sumpter B G, Terrones H, Xia F, Wang Y, Zhu J, Akinwande D, Alem N, Schuller J A, Schaak R E, Terrones M, Robinson J A. Recent advances in two-dimensional materials beyond Graphene. ACS Nano, 2015, 9(12): 11509–11539
Geim A K. Graphene: status and prospects. Science, 2009, 324 (5934): 1530–1534
Bonaccorso F, Sun Z P, Hasan T, Ferrari A C. Graphene photonics and optoelectronics. Nature Photonics, 2010, 4(9): 611–622
Mak K F, Shan J. Photonics and optoelectronics of 2D semiconductor transition metal dichalcogenides. Nature Photonics, 2016, 10(4): 216–226
Xia F, Wang H, Jia Y. Rediscovering black phosphorus as an anisotropic layered material for optoelectronics and electronics. Nature Communications, 2014, 5: 4458
Castellanos-Gomez A. Black phosphorus: Narrow gap, wide applications. The Journal of Physical Chemistry Letters, 2015, 6 (21): 4280–4291
Dou L, Wong A B, Yu Y, Lai M, Kornienko N, Eaton S W, Fu A, Bischak C G, Ma J, Ding T, Ginsberg N S, Wang L W, Alivisatos A P, Yang P. Atomically thin two-dimensional organic-inorganic hybrid perovskites. Science, 2015, 349(6255): 1518–1521
Huo C X, Cai B, Yuan Z, Ma B W, Zeng H B. Two-dimensional metal halide perovskites: theory, synthesis, and optoelectronics. Small Methods, 2017, 1(3): 1600018
Chen S, Shi G. Two-dimensional materials for halide perovskitebased optoelectronic devices. Advanced Materials, 2017, 29(24): 1605448
Choi D G, Jeong J H, Sim Y S, Lee E S, Kim W S, Bae B S. Fluorinated organic-inorganic hybrid mold as a new stamp for nanoimprint and soft lithography. Langmuir, 2005, 21(21): 9390–9392
Pardo D A, Jabbour G E, Peyghambarian N. Application of screen printing in the fabrication of organic light-emitting devices. Advanced Materials, 2000, 12(17): 1249–1252
Caruso F. Hollow capsule processing through colloidal templating and self-assembly. Chemistry (Weinheim an der Bergstrasse, Germany), 2000, 6(3): 413–419
Zhang J C, Zhou M J, Wu W D, Tang Y J. Fabrication of diamond microstructures by using dry and wet etching methods. Plasma Science & Technology, 2013, 15(6): 552–554
Zhang Y L, Guo L, Wei S, He Y Y, Xia H, Chen Q D, Sun H B, Xiao F S. Direct imprinting of microcircuits on graphene oxides film by femtosecond laser reduction. Nano Today, 2010, 5(1): 15–20
Zhang Y L, Chen Q D, Xia H, Sun H B. Designable 3D nanofabrication by femtosecond laser direct writing. Nano Today, 2010, 5(5): 435–448
Zheng X R, Lin H, Yang T S, Jia B H. Laser trimming of graphene oxide for functional photonic applications. Journal of Physics D, Applied Physics, 2017, 50(7): 074003
Yu S, Wu X, Wang Y, Guo X, Tong L. 2D materials for optical modulation: challenges and opportunities. Advanced Materials, 2017, 29(14): 1606128
Sun Z P, Martinez A, Wang F. Optical modulators with 2D layered materials. Nature Photonics, 2016, 10(4): 227–238
Wang F Q. Two-dimensional materials for ultrafast lasers. Chinese Physics B, 2017, 26(3): 034202
Yoo J H, Kim E, Hwang D J. Femtosecond laser patterning, synthesis, defect formation, and structural modification of atomic layered materials. MRS Bulletin, 2016, 41(12): 1002–1008
Li Z W, Hu Y H, Li Y, Fang Z Y. Light-matter interaction of 2D materials: physics and device applications. Chinese Physics B, 2017, 26(3): 036802
Ye M X, Zhang D Y, Yap Y K. Recent advances in electronic and optoelectronic devices based on two-dimensional transition metal dichalcogenides. Electronics (Basel), 2017, 6(2): 43
Zhao Y, Han Q, Cheng Z H, Jiang L, Qu L T. Integrated graphene systems by laser irradiation for advanced devices. Nano Today, 2017, 12: 14–30
Lu J, Liu H, Tok E S, Sow C H. Interactions between lasers and two-dimensional transition metal dichalcogenides. Chemical Society Reviews, 2016, 45(9): 2494–2515
Xiong W, Zhou Y S, Hou WJ, Jiang L J, Mahjouri-Samani M, Park J, He X N, Gao Y, Fan L S, Baldacchini T, Silvanin J F, Lu Y F. Laser-based micro/nanofabrication in one, two and three dimensions. Frontiers of Optoelectronics, 2015, 8(4): 351–378
Xiong W, Zhou Y S, Hou W J, Jiang L J, Gao Y, Fan L S, Jiang L, Silvain J F, Lu Y F. Direct writing of graphene patterns on insulating substrates under ambient conditions. Scientific Reports, 2014, 4(1): 4892
Zhang Y L, Guo L, Xia H, Chen Q D, Feng J, Sun H B. Photoreduction of graphene oxides: methods, properties, and applications. Advanced Optical Materials, 2014, 2(1): 10–28
Cote L J, Cruz-Silva R, Huang J. Flash reduction and patterning of graphite oxide and its polymer composite. Journal of the American Chemical Society, 2009, 131(31): 11027–11032
Gilje S, Dubin S, Badakhshan A, Farrar J, Danczyk S A, Kaner R B. Photothermal deoxygenation of graphene oxide for patterning and distributed ignition applications. Advanced Materials, 2010, 22(3): 419–423
Koinuma M, Ogata C, Kamei Y, Hatakeyama K, Tateishi H, Watanabe Y, Taniguchi T, Gezuhara K, Hayami S, Funatsu A, Sakata M, Kuwahara Y, Kurihara S, Matsumoto Y. Photochemical engineering of graphene oxide nanosheets. Journal of Physical Chemistry C, 2012, 116(37): 19822–19827
Li X H, Chen J S, Wang X, Schuster M E, Schlögl R, Antonietti M. A green chemistry of graphene: photochemical reduction towards monolayer graphene sheets and the role of water adlayers. ChemSusChem, 2012, 5(4): 642–646
Stroyuk A L, Andryushina N S, Shcherban’ N D, Il’in V G, Efanov V S, Yanchuk I B, Kuchmii S Y, Pokhodenko V D. Photochemical reduction of graphene oxide in colloidal solution. Theoretical and Experimental Chemistry, 2012, 48(1): 2–13
Castellanos-Gomez A, Barkelid M, Goossens A M, Calado V E, van der Zant H S J, Steele G A. Laser-thinning of MoS2: on demand generation of a single-layer semiconductor. Nano Letters, 2012, 12 (6): 3187–3192
Han G H, Chae S J, Kim E S, Güneş F, Lee I H, Lee S W, Lee S Y, Lim S C, Jeong H K, Jeong M S, Lee Y H. Laser thinning for monolayer graphene formation: heat sink and interference effect. ACS Nano, 2011, 5(1): 263–268
Lu J, Carvalho A, Chan X K, Liu H, Liu B, Tok E S, Loh K P, Castro Neto A H, Sow C H. Atomic healing of defects in transition metal dichalcogenides. Nano Letters, 2015, 15(5): 3524–3532
Cho S, Kim S, Kim J H, Zhao J, Seok J, Keum D H, Baik J, Choe D H, Chang K J, Suenaga K, Kim S W, Lee Y H, Yang H. Phase patterning for ohmic homojunction contact in MoTe2. Science, 2015, 349(6248): 625–628
Lu J,Wu J, Carvalho A, Ziletti A, Liu H, Tan J, Chen Y, Castro Neto A H, Özyilmaz B, Sow C H. Bandgap engineering of phosphorene by laser oxidation toward functional 2D materials. ACS Nano, 2015, 9(10): 10411–10421
Guo L, Zhang Y L, Han D D, Jiang H B, Wang D, Li X B, Xia H, Feng J, Chen Q D, Sun H B. Laser-mediated programmable N doping and simultaneous reduction of graphene oxides. Advanced Optical Materials, 2014, 2(2): 120–125
Savva K, Lin Y H, Petridis C, Kymakis E, Anthopoulos T D, Stratakis E. In situ photo-induced chemical doping of solutionprocessed graphene oxide for electronic applications. Journal of Materials Chemistry C, Materials for Optical and Electronic Devices, 2014, 2(29): 5931–5937
Kim E, Ko C, Kim K, Chen Y, Suh J, Ryu S G, Wu K, Meng X, Suslu A, Tongay S, Wu J, Grigoropoulos C P. Site selective doping of ultrathin metal dichalcogenides by laser-sssisted reaction. Advanced Materials, 2016, 28(2): 341–346
Zhang Y L, Xia H, Kim E, Sun H B. Recent developments in superhydrophobic surfaces with unique structural and functional properties. Soft Matter, 2012, 8(44): 11217–11231
Jiang H B, Zhang Y L, Han D D, Xia H, Feng J, Chen Q D, Hong Z R, Sun H B. Bioinspired fabrication of superhydrophobic graphene films by two-beam laser interference. Advanced Functional Materials, 2014, 24(29): 4595–4602
Xie Q, Hong M H, Tan H L, Chen G X, Shi L P, Chong T C. Fabrication of nanostructures with laser interference lithography. Journal of Alloys and Compounds, 2008, 449(1–2): 261–264
Zheng X, Jia B, Lin H, Qiu L, Li D, Gu M. Highly efficient and ultra-broadband graphene oxide ultrathin lenses with three-dimensional subwavelength focusing. Nature Communications, 2015, 6: 8433
Lin H, Xu Z Q, Bao Q L, Jia B H. Laser fabricated ultrathin flat lens in sub-nanometer thick monolayer transition metal dichalcogenides crystal. In: Proceedings of Conference on Lasers and Electro-Optics (CLEO), 2016, SF2E.4, 1–2
Yu N, Capasso F. Flat optics with designer metasurfaces. Nature Materials, 2014, 13(2): 139–150
Zheng X R. The optics and applications of graphene oxide. Dissertation for the Doctoral Degree. Australia: Swinburne University of Technology, 2016
Zheng X R, Cao Z, Jia B H, Qiu L, Li D, Gu M. Direct patterning of C-shape arrays on graphene oxide thin films using direct laser printing. In: Proceedings of Frontiers in Optics 2014. Tucson, Arizona: Optical Society of America, FW2B
Bao Q L, Zhang H, Wang B, Ni Z H, Lim C H Y X, Wang Y, Tang D Y, Loh K P. Broadband graphene polarizer. Nature Photonics, 2011, 5(7): 411–415
Jia B H, Zheng X R, Lin H, Yang Y Y, Fraser S. Graphene oxide thin films for functional photonic devices. In: Proceedings of Frontiers in Optics 2016. Rochester, New York: Optical Society of America, FTu5B.4
Kim Y D, Bae M H, Seo J T, Kim Y S, Kim H, Lee J H, Ahn J R, Lee S W, Chun S H, Park Y D. Focused-laser-enabled p-n junctions in graphene field-effect transistors. ACS Nano, 2013, 7(7): 5850–5857
El-Kady M F, Kaner R B. Direct laser writing of graphene electronics. ACS Nano, 2014, 8(9): 8725–8729
Seo B H, Youn J, Shim M. Direct laser writing of air-stable p-n junctions in graphene. ACS Nano, 2014, 8(9): 8831–8836
Kymakis E, Petridis C, Anthopoulos T D, Stratakis E. Laser-assisted reduction of graphene oxide for flexible, large-area optoelectronics. IEEE Journal of Selected Topics in Quantum Electronics, 2014, 20 (1): 106–115
Kymakis E, Savva K, Stylianakis M M, Fotakis C, Stratakis E. Flexible organic photovoltaic cells with in situ nonthermal photoreduction of spin-coated graphene oxide electrodes. Advanced Functional Materials, 2013, 23(21): 2742–2749
Cao D H, Stoumpos C C, Farha O K, Hupp J T, Kanatzidis MG. 2D homologous perovskites as light-absorbing materials for solar cell applications. Journal of the American Chemical Society, 2015, 137 (24): 7843–7850
Tsai H, Nie W, Blancon J C, Stoumpos C C, Asadpour R, Harutyunyan B, Neukirch A J, Verduzco R, Crochet J J, Tretiak S, Pedesseau L, Even J, Alam M A, Gupta G, Lou J, Ajayan P M, Bedzyk M J, Kanatzidis M G, Mohite A D. High-efficiency twodimensional Ruddlesden-Popper perovskite solar cells. Nature, 2016, 536(7616): 312–316
Su R, Diederichs C, Wang J, Liew T C H, Zhao J, Liu S, Xu W, Chen Z, Xiong Q. Room temperature polariton lasing in allinorganic perovskite nanoplatelets. Nano Letters, 2017, 17(6): 3982–3988
Kanaujia P K, Vijaya Prakash G. Laser-induced microstructuring of two-dimensional layered inorganic-organic perovskites. Physical Chemistry Chemical Physics, 2016, 18(14): 9666–9672
Chou S S, Swartzentruber B S, Janish MT, Meyer K C, Biedermann L B, Okur S, Burckel D B, Carter C B, Kaehr B. Laser direct write synthesis of lead halide perovskites. The Journal of Physical Chemistry Letters, 2016, 7(19): 3736–3741
Zheng X, Jia B, Chen X, Gu M. In situ third-order non-linear responses during laser reduction of graphene oxide thin films towards on-chip non-linear photonic devices. Advanced Materials, 2014, 26(17): 2699–2703
Fraser S, Zheng X R, Qiu L, Li D, Jia B H. Enhanced optical nonlinearities of hybrid graphene oxide films functionalized with gold nanoparticles. Applied Physics Letters, 2015, 107(3): 031112
Ren J, Zheng X R, Tian Z, Li D, Wang P, Jia B H. Giant third-order nonlinearity from low-loss electrochemical graphene oxide film with a high power stability. Applied Physics Letters, 2016, 109(22): 221105
Thangavelu P, Jong-Beom B. Graphene based 2D-materials for supercapacitors. 2D Materials, 2015, 2: 032002
Dong Y, Wu Z S, Ren W C, Cheng H M, Bao X H. Graphene: a promising 2D material for electrochemical energy storage. Science Bulletin, 2017, 62(10): 724–740
Shao Y, El-Kady M F, Wang L J, Zhang Q, Li Y, Wang H, Mousavi M F, Kaner R B. Graphene-based materials for flexible supercapacitors. Chemical Society Reviews, 2015, 44(11): 3639–3665
Raccichini R, Varzi A, Passerini S, Scrosati B. The role of graphene for electrochemical energy storage. Nature Materials, 2015, 14(3): 271–279
Lv W, Li Z J, Deng Y Q, Yang Q H, Kang F Y. Graphene-based materials for electrochemical energy storage devices: Opportunities and challenges. Energy Storage Materials, 2016, 2: 107–138
Yang X, Cheng C, Wang Y, Qiu L, Li D. Liquid-mediated dense integration of graphene materials for compact capacitive energy storage. Science, 2013, 341(6145): 534–537
El-Kady MF, Strong V, Dubin S, Kaner R B. Laser scribing of highperformance and flexible graphene-based electrochemical capacitors. Science, 2012, 335(6074): 1326–1330
El-Kady M F, Kaner R B. Scalable fabrication of high-power graphene micro-supercapacitors for flexible and on-chip energy storage. Nature Communications, 2013, 4: 1475
Gao W, Singh N, Song L, Liu Z, Reddy A L M, Ci L, Vajtai R, Zhang Q, Wei B, Ajayan P M. Direct laser writing of microsupercapacitors on hydrated graphite oxide films. Nature Nanotechnology, 2011, 6(8): 496–500
Yan Z X, Zhang Y L, Wang W, Fu X Y, Jiang H B, Liu Y Q, Verma P, Kawata S, Sun H B. Superhydrophobic SERS substrates based on silver-coated reduced graphene oxide gratings prepared by twobeam laser interference. ACS Applied Materials & Interfaces, 2015, 7(49): 27059–27065
Wan X, Huang Y, Chen Y. Focusing on energy and optoelectronic applications: a journey for graphene and graphene oxide at large scale. Accounts of Chemical Research, 2012, 45(4): 598–607
Ding X, Liu H, Fan Y. Graphene-based materials in regenerative medicine. Advanced Healthcare Materials, 2015, 4(10): 1451–1468
Guo W, Wang S, Yu X, Qiu J, Li J, Tang W, Li Z, Mou X, Liu H, Wang Z. Construction of a 3D rGO-collagen hybrid scaffold for enhancement of the neural differentiation of mesenchymal stem cells. Nanoscale, 2016, 8(4): 1897–1904
Lorenzoni M, Brandi F, Dante S, Giugni A, Torre B. Simple and effective graphene laser processing for neuron patterning application. Scientific Reports, 2013, 3(1): 1954
Peláez R J, González-Mayorga A, Gutiérrez M C, García-Rama C, Afonso C N, Serrano M C. Tailored fringed platforms produced by laser interference for aligned neural cell growth. Macromolecular Bioscience, 2016, 16(2): 255–265
Tao W, Zhu X, Yu X, Zeng X, Xiao Q, Zhang X, Ji X, Wang X, Shi J, Zhang H, Mei L. Black phosphorus nanosheets as a robust delivery platform for cancer theranostics. Advanced Materials, 2017, 29(1): 1603276
Sun Z, Xie H, Tang S, Yu X F, Guo Z, Shao J, Zhang H, Huang H, Wang H, Chu P K. Ultrasmall black phosphorus quantum dots: synthesis and use as photothermal agents. Angewandte Chemie International Edition, 2015, 54(39): 11526–11530
Shao J, Xie H, Huang H, Li Z, Sun Z, Xu Y, Xiao Q, Yu X F, Zhao Y, Zhang H, Wang H, Chu P K. Biodegradable black phosphorusbased nanospheres for in vivo photothermal cancer therapy. Nature Communications, 2016, 7: 12967
Gan Z, Cao Y, Evans R A, Gu M. Three-dimensional deep subdiffraction optical beam lithography with 9 nm feature size. Nature Communications, 2013, 4: 2061
Lin H, Jia B, Gu M. Dynamic generation of Debye diffractionlimited multifocal arrays for direct laser printing nanofabrication. Optics Letters, 2011, 36(3): 406–408
Acknowledgements
Baohua Jia acknowledges the support from the Australia Research Council through the Discovery Project scheme (DP150102972) and the support from Defense Science Institute and Defense Science and Technology Group.
Author information
Authors and Affiliations
Corresponding author
Additional information
Tieshan Yang received his Bachelor degree in Applied Physics from Ludong University, China in 2012 and his Master degree in Optical Engineering from Beijing University of Technology, China in 2015. He is now a PhD student under the supervision of Prof. Baohua Jia at Swinburne University of Technology, Australia. His research interests focus on laser nanofabrication on 2D materials for functional photonics devices.
Han Lin received his B.Sc. (2005) and M. Sc. (2008) degrees from Xiamen University, China. He was awarded a PhD (2013) from Swinburne University of Technology, Australia. He has dedicated interest and experience on optical system design and dynamic control of light-matter interaction, vectorial diffraction theory and superresolution. He is currently working as the Postdoctoral Research Fellow at Swinburne University of Technology. His research interests focus on light-matter interaction on 2D materials and the applications in the energy storage devices and molecular separation.
Baohua Jia is a full Professor and Research Leader at Swinburne University of Technology. She received her B.Sc. (2000) and M. Sc. (2003) degrees from Nankai University, China. She was awarded a PhD (2007) from Swinburne University of Technology, Australia. She is the Head of Laser and Nanomaterial Interaction (LNI) Group. She uses light to develop various functional nanostructures to effectively harness and store clean energy and boost the performance of communication and imaging devices.
Rights and permissions
About this article
Cite this article
Yang, T., Lin, H. & Jia, B. Two-dimensional material functional devices enabled by direct laser fabrication. Front. Optoelectron. 11, 2–22 (2018). https://doi.org/10.1007/s12200-017-0753-1
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12200-017-0753-1