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Design and implementation of super-heterodyne nano-metrology circuits

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Abstract

The most important aim of nanotechnology development is to construct atomic-scale devices, and those atomic-scale devices are required to use some measurements that have ability to control and build in the range of these dimensions. A method based on super-heterodyne interferometers can be used to access the measurements in nano-scale. One of the most important limitations to increase the resolution of the displacement measurement is nonlinearity error. According to the base and measurement signals received by optical section of super-heterodyne interferometer, it is necessary for circuits to reconstruct and detect corresponding phase with target displacement. In this paper, we designed, simulated, and implemented the circuits required for electronic part of interferometer by complementary metal-oxide-semiconductor (CMOS) 0.5 μm technology. These circuits included cascade low-noise amplifiers (LNA) with 19.1 dB gain and 2.5 dB noise figure (NF) at 500 MHz frequency, band-pass filters with 500 MHz central frequency and 400 kHz bandwidth, double-balanced mixers with 233/0.6 μm ratio for metal-oxide-semiconductor field-effect transistors (MOSFETs), and low-pass filters with 300 kHz cutoff frequency. The experimental results show that the amplifiers have 19.41 dB gain and 2.7 dB noise factor, mixers have the ratio of radio frequency to local oscillator (RF/LO) range between 80 and 2500 MHz with intermediate frequency (IF) range between DC to 1000 MHz, and the digital phase measurement circuit based on the time-to-digital converter (TDC) has a nanosecond resolution.

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References

  1. Schattenburg M L, Smith H I. The critical role of metrology in nanotechnology. SPIE Proceedings, 2001, 4608: 116–124

    Article  Google Scholar 

  2. Burggraaf P. Optical lithography to 2000 and beyond. Solid State Technology, 1999, 42(2): 31–41

    Google Scholar 

  3. Lawall J, Kessler E. Michelson interferometry with 10 pm accuracy. Review of Scientific Instruments, 2000, 71(7): 2669–2676

    Article  Google Scholar 

  4. Olyaee S, Nejad M. Nonlinearity and frequency-path modelling of three-longitudinal-mode nanometric displacement measurement system. IET Optoelectronics, 2007, 1(5): 211–220

    Article  Google Scholar 

  5. Yokoyama T, Araki T, Yokoyama S, Suzuki N. A subnanometer heterodyne interferometric system with improved phase sensitivity using a three-longitudinal-mode He-Ne laser. Measurement Science and Technology, 2001, 12(2): 157–162

    Article  Google Scholar 

  6. Olyaee S, Hamedi S. A low-nonlinearity laser heterodyne interferometer with quadrupled resolution in the displacement measurement. Arabian Journal for Science and Engineering, 2011, 36(2): 279–286

    Article  Google Scholar 

  7. Guo J H, Zhang Y, Shen S. Compensation of nonlinearity in a new optical heterodyne interferometer with doubled measurement resolution. Optics Communications, 2000, 184(1–4): 49–55

    Article  Google Scholar 

  8. Olyaee S, Nejad S M. Error analysis, design and modeling of an improved heterodyne nano-displacement interferometer. Iranian Journal of Electrical and Electronic Engineering, 2007, 3(3–4): 53–63

    Google Scholar 

  9. Quenelle R C. Nonlinearity in interferometric measurements. Hewlett-Parkard Journal, 1983, 34(10): 3–13

    Google Scholar 

  10. Sutton C M. Non-linearity in the length measurement using hetrodyne laser Michelson interferometery. Journal of Physics E, Scientific Instruments, 1987, 20(10): 1290–1292

    Article  Google Scholar 

  11. Cosijns S J A G, Haitjema H, Schellekens P H J. Modeling and verifying non-linearities in heterodyne displacement interferometry. Precision Engineering, 2002, 26(4): 448–455

    Article  Google Scholar 

  12. Badami V G, Patterson S R. A frequency domain method for the measurement of nonlinearity in heterodyne interferometry. Precision Engineering, 2000, 24(1): 41–49

    Article  Google Scholar 

  13. Olyaee S, Yoon T H, Hamedi S. Jones matrix analysis of frequency mixing error in three-longitudinal-mode laser heterodyne interferometer. IET Optoelectronics, 2009, 3(5): 215–224

    Article  Google Scholar 

  14. Li Z, Herrmann K, Pohlenz F. A neural network approach to correcting nonlinearity in optical interferometers. Measurement Science and Technology, 2003, 14(3): 376–381

    Article  Google Scholar 

  15. Heo G, Lee W, Choi S, Lee J, You K. Adaptive neural network approach for nonlinearity compensation in laser interferometer. Knowledge-Based Intelligent Information and Engineering Systems, 2007, 4694: 251–258

    Article  Google Scholar 

  16. Olyaee S, Ebrahimpour R, Hamedi S. Modeling and compensation of periodic nonlinearity in two-mode interferometer using neural networks. Journal of the Institution of Electronics and Telecommunication Engineers, 2010, 56(2): 102–110

    Google Scholar 

  17. Baird K M. A new method in optical interferometry. Journal of the Optical Society of America, 1954, 44(1): 11–13

    Article  Google Scholar 

  18. Bruce C F, Hill R M. Wavelengths of krypton 86, mercury 198, and cadmium 114. Australian Journal of Physics, 1961, 14(1): 64–88

    Article  Google Scholar 

  19. Peck E R, Obetz S W. Wavelength or length measurement by reversible fringe counting. Journal of the Optical Society of America, 1953, 43(6): 505–509

    Article  Google Scholar 

  20. Polster H D, Pastor J, Scott R M, Crane R, Langenbeck P H, Pilston R, Steinberg G. New developments in interferometry. Applied Optics, 1969, 8(3): 521–556

    Article  Google Scholar 

  21. Lavan M J, Cadwallender W K, Deyoung T F. Heterodyne interferometer to determine relative optical phase changes. Review of Scientific Instruments, 1975, 46(5): 525–527

    Article  Google Scholar 

  22. Hariharan P. Optical Interferometry. 2nd ed. San Diego: Academic Press, 2003

    Google Scholar 

  23. Lee T H. The Design of CMOS Radio-Frequency Integrated Circuits. 2nd ed. Cambridge: Cambridge University Press, 2004

    Google Scholar 

  24. Demarest F C. High-resolution, high speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics. Measurement Science and Technology, 1998, 9(7): 1024–1030

    Article  Google Scholar 

  25. Olyaee S, Hamedi S, Dashtban Z. Design of electronic sections for nano-displacement measuring system. Frontiers of Optoelectronics in China, 2010, 3(4): 376–381

    Article  Google Scholar 

  26. TDC-GP1 manual, time-to-digital converter, http://www.acam.de

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Correspondence to Saeed Olyaee.

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Olyaee, S., Dashtban, Z. & Dashtban, M.H. Design and implementation of super-heterodyne nano-metrology circuits. Front. Optoelectron. 6, 318–326 (2013). https://doi.org/10.1007/s12200-013-0337-7

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  • DOI: https://doi.org/10.1007/s12200-013-0337-7

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