Abstract
In this paper, the principle of subaperture stitching interferometry was introduced. A testing stage with five degrees of freedom for stitching interferometry was built. A model based on least-squares method and error averaging method for data processing was established, which could reduce error accumulation and improve the precision. A 100 mm plane mirror was measured with a 50 mm aperture interferometer by means of stitching interferometry. Compared with the results by a 100 mm interferometer, peak to valley (PV) and root mean square (RMS) of the phase distribution residual are 0:0038λ and 0:0004λ, respectively. It proved that the model and method are helpful for large optical measurement.
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References
Cheng H B. Interferometric null testing and the model for separating adjustment errors. Journal of Harbin Institute of Technology, 2006, 38(8): 1247–1250
Yang L. Advanced Optical Manufacture Technology. Beijing: Science Press, 2001, 326–365 (in Chinese)
Malacara D. Optical Shop Testing. New York: Wiley-Interscience, 1978, 245–296
Cheng H B, Feng Z J. Error-separation model for interferometric testing aspheric surfaces based on wavefront aberrations. Journal of Tsinghua University (Science and Technology), 2006, 46(2): 187–190
Kim C J. Polynomial fit of interferograms. Applied Optics, 1982, 21(24): 4521–4525 doi:10.1364/AO.21.004521
Chow W W, Lawrence G N. Method for subaperture testing interferogram reduction. Optics Letters, 1983, 8(9): 468–470
De Hainaut C R, Erteza A. Numerical processing of dynamic subaperture testing measurements. Applied Optics, 1986, 25(4): 503–509
Catanzaro B E, Connell S J, Mimovich M, Backovsky S, Williams G, Thomas J A, Barber D D, Johnston R A, Hylton J C, Dodson K J, Cohen E J. Cryogenic (70 K) measurement of an all-composite 2-meter diameter mirror. Proceedings of SPIE, the International Society for Optical Engineering, 2001, 4444: 238–255
Bray M. Stitching interferometer for large optics: recent developments of a system. Proceedings of SPIE, the International Society for Optical Engineering, 1999, 3492(2): 946–956
Bray M. Stitching interferometer for large plano optics using a standard interferometer. Proceedings of SPIE, Optical manufacturing and testing II, 1997, 3134(1): 39–50
Otsubo M, Okada K, Tsujiuchi J. Measurement of large plane surface shapes by connecting small-aperture interferograms. Optical Engineering, 1994, 33(2): 608–613
Negro J E. Subaperture optical system testing. Applied Optics, 1984, 23(12): 1921–1930
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Gao, Y., Tam, H.Y., Wen, Y. et al. Measurement of optical mirror with a small-aperture interferometer. Front. Optoelectron. 5, 218–223 (2012). https://doi.org/10.1007/s12200-012-0233-6
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DOI: https://doi.org/10.1007/s12200-012-0233-6