Abstract
During the testing of aspherical mirrors through the null compensation method, structural parameters observe changes which affect the test results of interference pattern. Several errors are induced due to the maladjustment among compensator, interferometer and the mirror under test. It is important for optical manufacturing, testing and the actual alignment process to distinguish between the aberrations arising from both surface errors and maladjustment of the null compensation testing system. The purpose of this paper is to obtain the real aspheric surface errors during the optical polishing process. In this work, we have established an error separation model to the least square method to separate the errors caused by the maladjustment of the testing system from the test results. Finally, the analysis and simulation results show that high precision figure errors can be obtained by separating the maladjustment errors.
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References
Cheng H B. Interferometric null testing and the model for separating adjustment errors. Journal of Harbin Institute of Technology, 2006, 38(8): 1247–1250 (in Chinese)
Nam J, Rubinstein J, Thibos L. Wavelength adjustment using an eye model from aberrometry data. Journal of the Optical Society of America A, 2010, 27(7): 1561–1574
Cheng H B, Feng Z J. Error-separation model for interferometric testing aspheric surfaces based on wavefront aberrations. Journal of Tsinghua University, 2006, 46(2): 187–190 (in Chinese)
Chen X L, Ruan N J, Ma J, Su Y. Figure analysis and adjustment of a large aperture reflector. In: Proceedings of 4th International Symposium on Advanced Optical Manufacturing and Testing. 2009, 1561–1574
Liu J F, Long F N, Zhang W. Study on computer-aided alignment method. Proceedings of SPIE, 2005, 5638: 674–681
Lim R S. Staged attitude-metrology pointing control and parametric integrated modeling for space-based optical systems. Dissertation for the Master’s Degree. Cambridge: Massachusetts Institute of Technology, 2006, 118–124
Li Y. Advanced Optical Manufacture Technology. Beijing: Science Press, 2001, 326–365 (in Chinese)
Shannon R R, Wyant J. Applied Optics and Optical Engineering. New York: Academic Press, 1992, 2–53
Malacara D. Optical Shop Testing. New York: Wiley-Interscience, 2006, 498–546
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Feng, Y., Qiao, X., Cheng, H. et al. Method of optical interference testing error separation. Front. Optoelectron. China 3, 382–386 (2010). https://doi.org/10.1007/s12200-010-0125-6
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DOI: https://doi.org/10.1007/s12200-010-0125-6