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Mathematical validation of spring constant of a varying section fixed-fixed beam RF MEMS switch and effects of spring constant on the switching parameters

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Abstract

RF MEMS switch is an actuator which can be used to make or break a signal path in RF Communications. The proposed switch is an electrostatically actuated dual channel switch whose actuating beam has varying cross-section. This letter focuses on developing a mathematical model for the spring constant of a varying section fixed-fixed beam and validating it with simulation results. Unit load method and Moment area method are used in modeling of the beam. The theoretical and simulated results are matching closely and the difference is not more than 16%. Further, the effects of spring constant on the switch parameters like Pull-in Voltage, Switching time, Switching speed and restoring force are studied. The results and relations obtained are presented.

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Authors and Affiliations

  1. Department of Electronics and Instrumentation Engineering, Annamalai University, Chidambaram, Annamalainagar, 608002, India

    E Esther Devakirubai & M Manivannan

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  1. E Esther Devakirubai
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  2. M Manivannan
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Correspondence to E Esther Devakirubai.

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Devakirubai, E.E., Manivannan, M. Mathematical validation of spring constant of a varying section fixed-fixed beam RF MEMS switch and effects of spring constant on the switching parameters. Sādhanā 48, 90 (2023). https://doi.org/10.1007/s12046-023-02148-6

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  • DOI: https://doi.org/10.1007/s12046-023-02148-6

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