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A novel flexure-based Delta micromanipulator with low parasitic motions

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Abstract

This paper presents a novel compliant Delta micromanipulator with low parasitic motions. Flexure joints are used to construct the compliant counterpart of the Delta robot. The rigid-body modelling technique is employed for forward and inverse kinematic modelling. The compliance analysis of the design is formulated by resorting to the matrix method. Then, finite-element-analysis (FEA) simulations are done to verify the analytical models. The results confirm with acceptable deviations. Compensation factor based correction in the kinematic model is then proposed, which reduces the errors even further. A comparison with the other reported designs reveals that the proposed design displays an overall superior performance in terms of errors and parasitic motions. For an expected 50 \(\upmu \)m motion, the maximum error is observed to be 0.422%, and the maximum parasitic motions in the x, y, and z directions are 0.044%, 0.095%, and 0.018%, respectively.

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References

  1. Howell L L 2001 Compliant Mechanisms. Wiley, New York

    Google Scholar 

  2. Merlet J P 2005 Parallel Robots, vol. 128. Springer, Berlin

    MATH  Google Scholar 

  3. Clavel R 1988 A fast robot with parallel geometry. In: Proceedings of International Symposium on Industrial Robots, pp. 91–100

  4. Sternheim F 1987 Computation of the direct and inverse geometric models of the delta 4 parallel robot. Robotersysteme 3: 199–203

    Google Scholar 

  5. Pierrot F, Reynaud C and Fournier A 1990 Delta: a simple and efficient parallel robot. Robotica 8: 105–109

    Article  Google Scholar 

  6. Bouri M and Clavel R 2010 The linear delta: Developments and applications. In: ISR 2010 (41st International Symposium on Robotics) and ROBOTIK 2010 (6th German Conference on Robotics), VDE, pp. 1–8

  7. Jensen K A, Lusk C P and Howell L L 2006 An xyz micromanipulator with three translational degrees of freedom. Robotica 24: 305–314

    Article  Google Scholar 

  8. Yun Y and Li Y 2011 Optimal design of a 3-pupu parallel robot with compliant hinges for micromanipulation in a cubic workspace. Robot. Comput. Integr. Manuf. 27: 977–985

    Article  Google Scholar 

  9. Holston A C and Singh S P 2016 A design and control strategy for a compliant delta manipulator. In: Australasian Conference on Robotics and Automation, ACRA, vol. 2016, Australasian Robotics and Automation Association, pp. 30–38.

  10. Patil S, Alvares S C, Mannam P, Kroemer O and Temel F Z 2022 Deltaz: An Accessible Compliant Delta Robot Manipulator for Research and Education. arXiv preprintarXiv:2207.00721

  11. Li Y and Xu Q 2010 A totally decoupled piezo-driven xyz flexure parallel micropositioning stage for micro/nanomanipulation. IEEE Trans. Autom. Sci. Eng. 8: 265–279

    Article  Google Scholar 

  12. Yue Y, Gao F, Zhao X and Ge Q J 2010 Relationship among input-force, payload, stiffness and displacement of a 3-dof perpendicular parallel micro-manipulator. Mech. Mach. Theory 45: 756–771

    Article  MATH  Google Scholar 

  13. Awtar S, Ustick J and Sen S 2013 An xyz parallel-kinematic flexure mechanism with geometrically decoupled degrees of freedom. J. Mech. Robot. 5: 015001

    Article  Google Scholar 

  14. Hao G and Li H 2015 Design of 3-legged xyz compliant parallel manipulators with minimised parasitic rotations. Robotica 33: 787–806

    Article  Google Scholar 

  15. Li Y and Wu Z 2016 Design, analysis and simulation of a novel 3-dof translational micromanipulator based on the prb model.Mech. Mach. Theory 100: 235–258

    Article  Google Scholar 

  16. Xie Y, Li Y, Cheung C F, Zhu Z and Chen X 2020 Design and analysis of a novel compact xyz parallel precision positioning stage. Microsystem Technologies, pp. 1–8

  17. Niu M, Yang B, Yang Y and Meng G 2020 Modelling and parameter design of a 3-dof compliant platform driven by magnetostrictive actuators. Precis. Eng. 66: 255–268

    Article  Google Scholar 

  18. Tian Y, Lu K, Wang F, Zhou C, Ma Y, Jing X, Yang C and Zhang D 2020 A spatial deployable three-dof compliant nano-positioner with a three-stage motion amplification mechanism. IEEE/ASME Trans. Mechatron. 25: 1322–1334

    Article  Google Scholar 

  19. Al-Jodah A, Shirinzadeh B, Ghafarian M, Das T K and Pinskier J 2021 Design, modeling, and control of a large range 3-dof micropositioning stage. Mech. Mach. Theory 156: 104159

    Article  Google Scholar 

  20. Pham H H and Chen I M 2005 Stiffness modeling of flexure parallel mechanism. Precis. Eng. 29: 467–478

    Article  Google Scholar 

  21. Koseki Y, Tanikawa T, Koyachi N and Arai T 2002 Kinematic analysis of a translational 3-dof micro-parallel mechanism using the matrix method. Adv. Robot. 16: 251–264

    Article  Google Scholar 

  22. Mishra S K and Kumar C S 2018 Design and kinematics of a compliant Stewart micromanipulator. In: 2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), IEEE, pp. 1–6

  23. Paros J M and Weisbord L 1965 How to design flexure hinges. Mach. Des. 37: 151–156

    Google Scholar 

  24. Lobontiu N 2002 Compliant Mechanisms: Design of Flexure Hinges. CRC press, Boca Raton

    Book  Google Scholar 

  25. Smith S T 2014 Flexures: Elements of Elastic Mechanisms. CRC Press, Boca Raton

    Google Scholar 

  26. Li Y, Huang J and Tang H 2012 A compliant parallel xy micromotion stage with complete kinematic decoupling. IEEE Trans. Autom. Sci. Eng. 9: 538–553

    Article  Google Scholar 

  27. Tang X and Chen I M 2009 Synthesis and stiffness modeling of xyz flexure parallel mechanisms with large-motion and decoupled kinematic structure. Front. Mech. Eng. China 4: 160–172

    Article  Google Scholar 

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Authors and Affiliations

  1. Robotics and Intelligent Systems Laboratory, Department of Mechanical Engineering, Indian Institute of Technology, Kharagpur, 721302, India

    Suraj Kumar Mishra

  2. Robotics and Intelligent Systems Laboratory, Department of Mechanical Engineering, Indian Institute of Technology, Kharagpur, 721302, India

    Cheruvu Siva Kumar

Authors
  1. Suraj Kumar Mishra
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  2. Cheruvu Siva Kumar
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Correspondence to Suraj Kumar Mishra.

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Mishra, S.K., Kumar, C.S. A novel flexure-based Delta micromanipulator with low parasitic motions. Sādhanā 48, 8 (2023). https://doi.org/10.1007/s12046-022-02067-y

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  • DOI: https://doi.org/10.1007/s12046-022-02067-y

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