Abstract
In this work, ZnO thin films have been prepared by spray pyrolysis deposition method on the glass substrates. The effect of deposition parameters, such as deposition rate, substrate temperature and solution volume has been studied by X-ray diffraction (XRD) method, UV–Vis–NIR spectroscopy, scanning electron microscopy (SEM), and electrical measurements. The XRD patterns indicate polycrystalline wurtzite structure with preferred direction along (0 0 2) planes. Thin films have transparency around 90% in the visible range. The optical band gap was determined at 3.27 eV which did not change significantly. Evolution of electrical results containing the carriers’ density, sheet resistance and resistivity are in agreement with structural results. All the results suggest the best deposition parameters are: deposition rate, R = 3 ml/min, substrate temperature, T s = 450°C and thickness of the thin films t = 110–130 nm.
Similar content being viewed by others
References
D S Ginley and C Bright, MRS Bull. 25, 15 (2000)
H Chhina, S Campbell and O Kesler, J. Power Sources 161, 893 (2006)
N G Patel and V S Vaishnav, Sensors and Actuators B96, 180 (2003)
T Feng, A Ghosh and C Fishman, J. Appl. Phys. 50, 4972 (1979)
M Sawada, M Higuchi, S Kondo and H Saka, J. Appl. Phys. 40, 3332 (2001)
P K H Ho, J S Kim, J H Burroughs, H Becker, S F Y Li, T M Brown, F Cacialli and R H Friend, Nature (London) 404, 481 (2000)
D G Thomas, J. Phys. Chem. Solids 15, 86 (1960)
P Sharma, A Mansingh and K Sreenivas, Appl. Phys. Lett. 80, 553 (2002)
C Agashe, O Kluth, G Schope, H Siekmann, J Hupkes and B Rech, Thin Solid Films 442, 167 (2003)
Z L Wang, Adv . Mater 19, 889 (2007)
Z Sofiani and B Sahraoui, J. Appl. Phys 101, 063104 (2007)
For example, see: Y Kim, W Lee, D R Jung, J Kim, S N H Kim and B Park, Appl. Phys. Lett. 96, 171902 (2010)
For example, see: C J Lee, T J Lee, S C Lyu, Y Zhang, H Ruh and H J Lee, Appl. Phys. Lett. 81, 3648 (2002)
M Breedon, M B Rahmani, S H Keshmiri, W Wlodarski and K Kalantar-zadeh, Mater. Lett. 64, 291 (2010)
I Kortidis, K Moschovis, F A Mahmoud and G Kiriakidis, Thin Solid Films 518, 1208 (2009)
C Messaudi, S Abd-lefdil, D Sayah and M Cadene, Eur. Phys. J. Appl. Phys. 1, 181 (1998)
M M Bagheri-Mohagheghi, N Shahtahmasebi, M R Alinejad, A Youssefi and M Shokooh-Saremi, Solid State Sci. 11, 233 (2009)
M M Bagheri-Mohagheghi, N Shahtahmasebi, M R Alinejad, A Youssefi and M Shokooh-Saremi, Physica B403, 2431 (2008)
E G Birgin, I Chambouleyron and J M Martinez, J. Comput. Phys. 151, 862 (1999)
V Srikant and D R Clarke, J. Appl. Phys. 83, 5447 (1998)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
ARDYANIAN, M., BAGHERI-MOHAGHEGHI, M.M. & SEDIGH, N. Determination of the optimal parameters for the fabrication of ZnO thin films prepared by spray pyrolysis method. Pramana - J Phys 78, 625–634 (2012). https://doi.org/10.1007/s12043-011-0257-2
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12043-011-0257-2