Skip to main content
Log in

Study of influence on micro-fabricated resistive switching organic ZrO2 array by C-AFM measurement

  • Published:
Bulletin of Materials Science Aims and scope Submit manuscript

Abstract

In this paper, a comparison of the interfacial electronic properties between Pt/Ir conductive atomic force microscopy (C-AFM) tip and ZrO2 organic array was carried out. A uniformed ZrO2 array was fabricated with a mean diameter of around 1 μm using laser interference lithography. A C-AFM measurement set-up was built up. The I–V curve was directly measured of the organic ZrO2 array which shows a resistive switching characteristic by C-AFM measurement. The set voltage is 18.0 V and the reset voltage is −5.0 V. After the Pt layer was coated on the ZrO2 array, the set voltage decreases to 0.8 V and the reset voltage decreases to −2.2 V. This result shows that Pt layer can prevent the potential drop effectively. The electron barrier height between Pt/Ir C-AFM tip and organic ZrO2 array was enhanced by sputtering Pt layer on the ZrO2 organic array.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Figure 1
Figure 2
Figure 3
Figure 4

Similar content being viewed by others

References

  1. Horowitz G 1998 Adv. Mater. 10 365

  2. Oyamada T, Tanaka H, Matsushige K, Sasabe H and Adachi C 2003 Appl. Phys. Lett. 83 1252

  3. Biju K P, Liu X, Kim J, Jung S, Lee J and Hwang H 2011 Curr. Appl. Phys. 11 S102

  4. Li Y and Long S 2010 IEEE Electron. Device Lett. 31 117

  5. Peng S, Fei Z, Chen X, Zhu X and Li R 2011 Appl. Phys. Lett. 100 072101

  6. Tiedke S and Schmitz T 2001 Appl. Phys. Lett. 79 3678

  7. Wojtyniak M, Szot K and Waser R 2011 Appl. Surf. Sci. 257 7627

  8. Yang L, Kuegeler C, Szot K, Ruediger A and Waser R 2009 Appl. Phys. Lett. 95 013109

  9. Wang Z and Zhao G 2008 Sci. China Ser. E-Technol. Sci. 51 1995

  10. Wang Z and Zhao G 2011 J. Non-Cryst. Solids 357 1223

  11. Peter F, Szot K, Waser R, Reichenberg B, Tiedke S and Szade J 2004 Appl. Phys. Lett. 85 2896

  12. Peter F, Kubacki J, Szot K, Reichenberg B and Waser R 2006 Phys. Status Solidi A 203 616

  13. Awais M N, Muhammad N M, Navaneethan D, Kim H C, Jo J and Choi K H 2013 Microelectron. Eng. 103 167

  14. Su W S, Chena Y F, Hsiao C L and Tu L W 2007 Appl. Phys. Lett. 90 063110

Download references

Acknowledgements

This work was supported by the National Natural Science Foundation of China (No. 51372198). We thank the Foundation of young teachers of Xian University of Technology. We also thank the National Natural Science Foundation of China (No. 51202190).

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to YING LI.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

LI, Y., ZHAO, G., KOU, Z. et al. Study of influence on micro-fabricated resistive switching organic ZrO2 array by C-AFM measurement. Bull Mater Sci 38, 1055–1059 (2015). https://doi.org/10.1007/s12034-015-0932-x

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12034-015-0932-x

Keywords

Navigation