Abstract
Radio frequency (RF) magnetron sputtering is a versatile deposition technique that can produce thin, uniform, dense calcium phosphate coatings. In this paper, principle and character of magnetron sputtering is introduced, and development of the hydroxyapatite and its composite coatings application is reviewed. In addition, influence of heat treatment on magnetron sputtered coatings is discussed. The heat treated coatings have been shown to exhibit bioactive behaviour both in vivo and in vitro. At last, the future application of the bioactive ceramic coating deposited by magnetron sputtering is mentioned.
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Shi, J.Z., Chen, C.Z., Yu, H.J. et al. Application of magnetron sputtering for producing bioactive ceramic coatings on implant materials. Bull Mater Sci 31, 877–884 (2008). https://doi.org/10.1007/s12034-008-0140-z
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DOI: https://doi.org/10.1007/s12034-008-0140-z