, Volume 71, Issue 1, pp 212–223 | Cite as

Sequential Infiltration Synthesis of Al2O3 in Polyethersulfone Membranes

  • Ruben Z. Waldman
  • Devika Choudhury
  • David J. Mandia
  • Jeffrey W. Elam
  • Paul F. Nealey
  • Alex B. F. Martinson
  • Seth B. DarlingEmail author
Application of Atomic Layer Deposition for Functional Nanomaterials


We report the sequential infiltration synthesis (SIS) of aluminum oxide (Al2O3) into polyethersulfone (PES) ultrafiltration (UF) membranes to form hybrid nanocomposites. SIS relies on chemical interactions between precursor vapors and polymer functional groups, and enables nucleation and growth of inorganic materials to controlled depth. Using in situ Fourier-transform infrared spectroscopy and ellipsometry measurements, we demonstrate that trimethylaluminum associates with the sulfonyl groups in PES, extending the library of SIS-modified polymer nanocomposites to a previously undescribed polymer system and new application space: PES UF membranes. Depth-profiled x-ray photoelectron spectroscopy showed that the trimethylaluminum purge time dictates the extent of Al2O3 infiltration. Energy dispersive spectroscopy revealed the differences between SIS and atomic layer deposition in the membranes. This work demonstrates the viability of SIS to access the entire macroporous volume of PES UF membranes.



Use of the Center for Nanoscale Materials, an Office of Science user facility, was supported by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357. This material was based upon work supported by Laboratory Directed Research and Development (LDRD) funding from Argonne National Laboratory, provided by the Director, Office of Science, of the U.S. Department of Energy under Contract No. DE-AC02-06CH11357. This work made use of the Pritzker Nanofabrication Facility of the Institute for Molecular Engineering at the University of Chicago, which receives support from Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205), a node of the National Science Foundation’s National Nanotechnology Coordinated Infrastructure. Parts of this work were carried out at the Soft Matter Characterization Facility of the University of Chicago. The authors also acknowledge the MRSEC Shared User Facilities at the University of Chicago (NSF DMR-1420709) and the Geophysical Sciences Division at the University of Chicago.

Supplementary material

11837_2018_3142_MOESM1_ESM.pdf (4.4 mb)
Supplementary material 1 (PDF 4509 kb)


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Copyright information

© The Minerals, Metals & Materials Society 2018

Authors and Affiliations

  • Ruben Z. Waldman
    • 1
    • 2
  • Devika Choudhury
    • 3
  • David J. Mandia
    • 3
  • Jeffrey W. Elam
    • 3
    • 5
  • Paul F. Nealey
    • 1
    • 4
  • Alex B. F. Martinson
    • 4
  • Seth B. Darling
    • 1
    • 2
    • 5
    Email author
  1. 1.Institute for Molecular EngineeringUniversity of ChicagoChicagoUSA
  2. 2.Chemical Sciences and Engineering DivisionArgonne National LaboratoryLemontUSA
  3. 3.Applied Materials DivisionArgonne National LaboratoryLemontUSA
  4. 4.Materials Science DivisionArgonne National LaboratoryLemontUSA
  5. 5.Institute for Molecular EngineeringArgonne National LaboratoryLemontUSA

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