Skip to main content
Log in

Effect of Microstructure on the Electro-Mechanical Behaviour of Cu Films on Polyimide

  • Published:
JOM Aims and scope Submit manuscript

Abstract

Metal films on polymer substrates are commonly used in flexible electronic devices and may be exposed to large deformations during application. For flexible electronics, the main requirement is to remain conductive while stretching and compressing. Therefore, the electro-mechanical behaviour of 200-nm-thick Cu films on polyimide with two different microstructures (as-deposited and annealed) were studied by executing in situ fragmentation experiments with x-ray diffraction, under an atomic force microscope, and with 4-point probe resistance measurements in order to correlate the plastic deformation with the electrical behaviour. The three in situ techniques clearly demonstrate different behaviours controlled by the microstructure. Interestingly, the as-deposited film with a bi-modal microstructure is more suited for flexible electronic applications than an annealed film with homogenous 1-µm-sized grains. The as-deposited film reaches a higher yield stress, with unchanged electrical conductivity, and does not show extensive surface deformation during straining.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

References

  1. A.C. Siegel, S.T. Phillips, M.D. Dickey, N. Lu, Z. Suo, and G.M. Whitesides, Adv. Funct. Mater. 20, 28 (2010).

    Article  Google Scholar 

  2. G. Kettlgruber, M. Kaltenbrunner, C.M. Siket, R. Moser, I.M. Graz, R. Schwödiauer, and S. Bauer, J. Mater. Chem. A 1, 5505 (2013).

    Article  Google Scholar 

  3. Q. Cao, S.-H. Hur, Z.-T. Zhu, Y.G. Sun, C.-J. Wang, M.A. Meitl, M. Shim, and J.A. Rogers, Adv. Mater. 18, 304 (2006).

    Article  Google Scholar 

  4. M.J. Cordill, JOM 62, 9 (2010).

    Article  Google Scholar 

  5. D.C. Agrawal and R. Raj, Acta Metall. 37, 1265 (1989).

    Article  Google Scholar 

  6. M.J. Cordill, A. Taylor, J. Schalko, and G. Dehm, Metall. Mater. Trans. A 41, 870 (2010).

    Article  Google Scholar 

  7. M.J. Cordill, A.A. Taylor, J. Berger, K. Schmidegg, and G. Dehm, Philos. Mag. 92, 3346 (2012).

    Article  Google Scholar 

  8. A.A. Taylor, M.J. Cordill, L. Bowles, J. Schalko, and G. Dehm, Thin Solid Films 531, 354 (2013).

    Article  Google Scholar 

  9. S. Frank, U.A. Handge, S. Olliges, and R. Spolenak, Acta Mater. 57, 1442 (2009).

    Article  Google Scholar 

  10. N. Lu, X. Wang, Z. Suo, and J.J. Vlassak, Appl. Phys. Lett. 91, 221909 (2007).

    Article  Google Scholar 

  11. N. Lu, X. Wang, Z. Suo, and J. Vlassak, J. Mater. Res. 24, 379 (2009).

    Article  Google Scholar 

  12. J. Lohmiller, N.C. Woo, and R. Spolenak, Mater. Sci. Eng. A 527, 7731 (2010).

    Article  Google Scholar 

  13. A. Kelly and W.R. Tyson, J. Mech. Phys. Solids 13, 329 (1965).

    Article  Google Scholar 

  14. J. Andersons, Y. Leterrier, G. Tornare, P. Dumont, and J.A. Månson, Mech. Mater. 39, 834 (2007).

    Article  Google Scholar 

  15. W.P. Vellinga, J.T.M. De Hosson, and P.C.P. Bouten, J. Appl. Phys. 112, 083520 (2012).

    Article  Google Scholar 

  16. N.C. Woo, K. Cherenack, G. Tröster, and R. Spolenak, Appl. Phys. A 100, 281 (2010).

    Article  Google Scholar 

  17. P.A. Gruber, C. Solenthaler, E. Arzt, and R. Spolenak, Acta Mater. 56, 1876 (2008).

    Article  Google Scholar 

  18. V.M. Marx, F. Toth, A. Wiesinger, J. Berger, C. Kirchlechner, M.J. Cordill, F.D. Fischer, F.G. Rammerstorfer, and G. Dehm, Acta Mater. 89, 278 (2015).

    Article  Google Scholar 

  19. O. Glushko and M.J. Cordill, Exp. Tech. (2014). doi:10.1111/EXT.12082.

    Google Scholar 

  20. N. Lu, Z. Suo, and J.J. Vlassak, Acta Mater. 58, 1679 (2010).

    Article  Google Scholar 

  21. M.J. Cordill and V.M. Marx, Philos. Mag. Lett. 93, 618 (2013).

    Article  Google Scholar 

  22. L. Spieß, G. Teichert, R. Schwarzer, H. Behnken, and C. Genzel, Moderne Röntgenbeugung (Wiesbad: Teubner, 2005).

    Book  Google Scholar 

  23. I.C. Noyan and J.B. Cohen, Residual Stress: Measurement by Diffraction and Interpretation (New York: Springer, 2013).

    Google Scholar 

  24. P.A. Gruber, E. Arzt, and R. Spolenak, J. Mater. Res. 24, 1906 (2009).

    Article  Google Scholar 

  25. O. Glushko and M.J. Cordill, JOM 66, 1 (2014).

    Article  Google Scholar 

  26. A. Erko, I. Packe, C. Hellwig, M. Fieber-Erdmann, O. Pawlizki, M. Veldkamp, and W. Gudat, AIP Conf. Proc. 521 (Melville, NY: AIP Publishing, 2000), pp. 415–418.

  27. D. Nečas and P. Klapetek, Open Phys. 10, 181 (2012).

    Google Scholar 

  28. M.J. Cordill and V.M. Marx, MRS Proc. 1527, 2 (2013).

    Article  Google Scholar 

  29. O. Glushko, V.M. Marx, C. Kirchlechner, I. Zizak, and M.J. Cordill, Thin Solid Films 552, 141 (2014).

    Article  Google Scholar 

  30. G.-D. Sim, Y.-S. Lee, S.-B. Lee, and J.J. Vlassak, Mater. Sci. Eng. A 575, 86 (2013).

    Article  Google Scholar 

  31. M.J. Cordill, O. Glushko, J. Kreith, V.M. Marx, and C. Kirchlechner, Microelectron. Eng. 137, 96 (2014).

    Article  Google Scholar 

Download references

Acknowledgements

Funding of the research has been provided by the Austrian Science Foundation (FWF) through Project P22648-N20. The authors would like to thank the HZB for the allocation of synchrotron radiation beamtime and thankfully acknowledges the financial support by the HZB (Project No. 2011_2_110211 and 2012_1_111115). The authors would like to also thank I. Zizak and D. Többens, of the HZB for beamline support and J. Schalko of the Research Unit for Integrated Sensor Systems of the Austrian Academy of Sciences (Wiener Neustadt, Austria) for providing the Cu films.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to M. J. Cordill.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Berger, J., Glushko, O., Marx, V.M. et al. Effect of Microstructure on the Electro-Mechanical Behaviour of Cu Films on Polyimide. JOM 68, 1640–1646 (2016). https://doi.org/10.1007/s11837-016-1940-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11837-016-1940-z

Keywords

Navigation