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The chemical vapor synthesis of inorganic nanopowders

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Abstract

Chemical vapor synthesis (CVS) is a process for making fine solid particles by the vapor-phase chemical reactions of precursors. At the University of Utah, this process has been applied to the synthesis of the aluminides of titanium and nickel, other metallic and intermetallic powders, and subsequently aluminum nanopowder and WC-Co nanocomposite powder. This work has demonstrated that it is possible to prepare fine particles of 5–200 nm size by CVS. Further, it has been shown that this technique has a unique capability to produce uniformly mixed powders of different solids. This is possible because the reactants are perfectly mixed in the gas phase. More recently, the CVS process has been carried out in a plasma reactor. This system has shown considerable promise for many applications as a method of producing nanosized powders.

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Correspondence to Hong Yong Sohn.

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Sohn, H.Y., Ryu, T., Choi, J.W. et al. The chemical vapor synthesis of inorganic nanopowders. JOM 59, 44–49 (2007). https://doi.org/10.1007/s11837-007-0151-z

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