Abstract
Chemical vapor synthesis (CVS) is a process for making fine solid particles by the vapor-phase chemical reactions of precursors. At the University of Utah, this process has been applied to the synthesis of the aluminides of titanium and nickel, other metallic and intermetallic powders, and subsequently aluminum nanopowder and WC-Co nanocomposite powder. This work has demonstrated that it is possible to prepare fine particles of 5–200 nm size by CVS. Further, it has been shown that this technique has a unique capability to produce uniformly mixed powders of different solids. This is possible because the reactants are perfectly mixed in the gas phase. More recently, the CVS process has been carried out in a plasma reactor. This system has shown considerable promise for many applications as a method of producing nanosized powders.
Similar content being viewed by others
References
G.A. Nikklason, “Optical Properties of Gas-Evaporated Metal Particles: Effects of a Fractal Structure,” J. Appl. Phys., 62 (1987), pp. 258–265.
Y. Okamoto, T. Koyano, and A. Tasaki, “A Magnetic Study of Sintering of Ultrafine Particles,” Japan J. Appl. Phys., 26 (1987), pp. 1943–1944.
H. Parr and J. Feder, “Superconductivity in β-Phase Gallium,” Phys. Rev., 7 (1973), pp. 166–181.
H. Lamprey and R. L. Ripley, “Ultrafine Tungsten and Molybdenum Powders,” J. Electrochem. Soc., 109(8) (1962), pp. 713–716.
Y. Saeki et al., “Preparation of Cobalt Powder by Hydrogen Reduction of Cobalt Dichloride,” Denki Kagaku, 46 (1978), pp. 613–617.
K.-I. Otsuka, H. Yamamoto, and A. Yoshizawa, “Preparation of Ultrafine Particles of Nickel, Cobalt and Iron by Hydrogen Reduction of Chloride Vapors,” J. Chem. Soc. Japan, 6 (1984), pp. 869–878.
J. Hojo, T. Oku, and A. Kato, “Tungsten Carbide Powder Produced by the Vapor Phase Reaction of the WCl6-CH4-H2 System,” J. Less Common Metals, 59 (1978), pp. 85–95.
G.Y. Zhao, V.V.S. Revankar, and V. Hlavacek, “Preparation of Tungsten and Tungsten Carbide Submicron Powders in a Chlorine-Hydrogen Flame by Chemical Vapor Phase Reaction,” J. Less Common Metals, 163 (1990), pp. 269–280.
C.-W. Won, B.-S. Chun, and H.Y. Sohn, “Preparation of Ultrafine Tungsten Carbide Powder by CVD Method from WCl6-C2H2-H2 Mixtures,” J. Materials Research, 8 (1993), pp. 2702–2708.
H.Y. Sohn and S. PalDey, “Synthesis of Ultrafine Particles and Thin Films of Ni4Mo by the Vapor-Phase Hydrogen Coreduction of the Constituent Metal Chlorides,” Mater. Sci. Eng. A, 247 (1998), pp. 165–172.
H.Y. Sohn and S. PalDey, “Synthesis of Ultrafine Nickel Aluminide Particles by the Hydrogen Reduction of Vapor-Phase Mixtures of NiCl2 and AlCl3,” J. Mater. Res., 13 (1998), pp. 3060–3069.
H.Y. Sohn and S. PalDey, “Synthesis of Ultrafine Particles of Intermetallic Compounds by the Vapor-Phase Magnesium Reduction of Chloride Mixtures: Part I. Titanium Aluminides,” Metall. Mater. Trans. B, 29B (1998), pp. 457–464.
H.Y. Sohn and S. PalDey, “Synthesis of Ultrafine Particles of Intermetallic Compounds by the Vapor-Phase Magnesium Reduction of Chloride Mixtures: Part II. Nickel Aluminides,” Metall. Mater. Trans. B, 29B (1998), pp. 465–469.
H.Y. Sohn et al., “Chemical Vapor Synthesis of Ultrafine Fe-Co Powder,” High Temperature Materials and Processes, 23 (2004), pp. 329–333.
A.M. Seayad and D.M. Atonelli, “Recent Advances in Hydrogen Storage in Metal-Containing Inorganic Nanostructures and Related Materials,” Advanced Materials, 16 (2004), pp. 765–777.
L. Zaluski, A. Zaluska, and J.O. Ström-Olsen, “Hydrogenation Properties of Complex Alkali Metal Hydrides Fabricated by Mechano-Chemical Synthesis,” J. Alloys and Compounds, 290 (1999), pp. 71–78.
J. Iñiguez and T. Yildirim, “First-Principles Study of Ti-Doped Sodium Alanate Surfaces,” Applied Physics Letters, 86 (2005), pp. 103–109.
A. Züttel et al., “LiBH4—A New Hydrogen Storage Material,” J. Power Sources, 118 (2003), pp. 1–7.
M. Fichtner and O. Fuhr, “Synthesis and Structures of Magnesium Alanate and Two Solvent Adducts,” J. Alloys and Compounds, 345 (2002), pp. 286–296.
J. Graetz et al., “Aluminum Hydride, AlH3, as a Hydrogen Storage Compound,” Advanced Materials for Energy Conversion III, ed. D. Chandra et al. (Warrendale, PA: TMS, 2006), pp. 57–63.
HSC Chemistry, Version 5.1, Outokumpu Research Oy, Finland, 2002.
G.S. Upadhaya, Cemented Tungsten Carbide (New York: Noyes Publications, 2002), p. 1.
S. Wahlberg, I. Grenthe, and M. Muhammed, “Nanostructured Hard Material Composites by Molecular Engineering 1. Synthesis from Soluble Tungstate Salts,” Nanostructured Materials, 9 (1997), pp. 105–108.
Y.T. Zhu and A. Manthiram, “Influence of Processing Parameters on the Formation of WC-Co Nanocomposite Powder using a Polymer as Carbon Source,” Composites Part B: Engineering, 27 (1996), pp. 407–413.
L.E. McCandlish, B.H. Kear, and B.K. Kim, “Processing and Properties of Nanostructured WC-Co,” Nanostructured Materials, 1 (1992), pp. 119–124.
J.A. Puszynski, “Advances in the Formation of Metal and Ceramic Nanopowders,” Power Materials: Current Research and Industrial Practices, (2001), pp. 89–105.
W. Chang et al., “Chemical Vapor Condensation of Nanostructured Ceramic Powders,” Nanostructured Materials, 4 (1994), pp. 345–351.
B.D. Cullity, Elements of X-ray Diffraction (Reading, MA: Addison-Wesley Pub. Co., 1978), pp. 99–106, 415–417.
T. Ryu, K.S. Hwang, and H.Y. Sohn, unpublished work, University of Utah, Salt Lake City, Utah (2007).
R.W. Sara, “Phase Equilibria in the System Tungsten-Carbon,” J. Amer. Ceram. Soc., 48 (1965), p. 253.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Sohn, H.Y., Ryu, T., Choi, J.W. et al. The chemical vapor synthesis of inorganic nanopowders. JOM 59, 44–49 (2007). https://doi.org/10.1007/s11837-007-0151-z
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11837-007-0151-z