Abstract
The focused-ion-beam (FIB) microscope has evolved into an important microstructure characterization instrument. The capability of high-resolution imaging using both secondary electron and secondary ion signals has made the FIB microscope a unique imaging tool. Stress-free cross sectioning using the primary gallium ion beam provides valuable microstructure information beneath the specimen surface. In addition, FIB techniques are often preferred to prepare transmission-electron microscope (TEM) specimens, which are frequently impossible to make by any other conventional methods. In this paper, various FIB microscopy applications in microstructural characterizations are discussed using examples from recent research, and conventional FIB-TEM specimen preparation techniques are illustrated.
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Li, J. The focused-ion-beam microscope—More than a precision ion milling machine. JOM 58, 27–31 (2006). https://doi.org/10.1007/s11837-006-0156-z
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DOI: https://doi.org/10.1007/s11837-006-0156-z