Modeling multilayered MEMS-based micro-fluidic systems
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This article describes the design, fabrication, and simulation of two micro-electromechanical systems-based micro-fluidic systems. The first system, a lab-on-a-chip, enables electrochemical immunoassay-based chemical/biological detection. The second is a micro-fluidic bio-impedance sensor. The relevance of fluidic dynamics in micro-fluidic channels is discussed in context of fluid paths and misalignments in the channels that appear during multi-level structure integration. Also discussed is the effect of channel dimensions on the flow profile and on performance within the micro-systems.
KeywordsElectrical Impedance Tomography High Pressure Drop Electrochemical Immunoassay Inlet Length Voltage Potential Difference
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