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Modification of a low-soda easy-sintered α-Al2O3 powder for the application in semiconductor/display production equipment

  • Materials (Organic, Inorganic, Electronic, Thin Films)
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Abstract

Semiconductor and display production equipment requires highly plasma-resistant components, where α-Al2O3 plays a vital role in shielding and insulating. In the present study, the physicochemical properties of a new domestic α-Al2O3 powder were compared with those of imported ones currently used in the Korean industry. The particle size distribution revealed finer particles in the domestic powder that were generated during dry milling than the imported powder resulting in a broad size distribution and high surface area. An effort was made to eliminate the fine particles by heat treatment because they increase the viscosity of a slurry for wet processing and induce a low green and sintered density of the final products. In addition to the effects of heat treatment on the powder characteristics, the dispersion behavior of an aqueous Al2O3 slip was examined systematically upon the addition of each polymeric processing additive for filter pressing.

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Acknowledgements

This study was supported by the i-Ceramic Manufacturing Innovation Program (20003891) and the Technology Innovation Program (20012911) funded by the Korean Ministry of Trade, Industry & Energy. The authors also thank the Core Research Support Center for Natural Products and Medical Materials (CRCNM) for technical support regarding surface area measurement.

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Authors and Affiliations

  1. School of Materials Science and Engineering, Yeungnam University, Gyeongsan, 38541, Korea

    Athiruban Sakthisabarimoorthi, Min Ji Kang & Dang-Hyok Yoon

Authors
  1. Athiruban Sakthisabarimoorthi
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  2. Min Ji Kang
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  3. Dang-Hyok Yoon
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Corresponding author

Correspondence to Dang-Hyok Yoon.

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Declaration of Competing Interest

The authors declare that they have no known competing financial interests or personal relationships that could have influenced the work reported in this paper.

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Sakthisabarimoorthi, A., Kang, M.J. & Yoon, DH. Modification of a low-soda easy-sintered α-Al2O3 powder for the application in semiconductor/display production equipment. Korean J. Chem. Eng. 38, 2541–2548 (2021). https://doi.org/10.1007/s11814-021-0915-0

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  • DOI: https://doi.org/10.1007/s11814-021-0915-0

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