Abstract
The optical and electrical properties of Ar plasma, ignited using low-frequency (LF, 60 Hz) power source, were investigated. The plasma resistance, electron temperature, and density were found to be ∼102 Ω, ∼3 eV and ∼108 cm−3, respectively. The plasma parameters are strongly dependent on Ar pressure and discharge current, and the results of optical emission analysis showed similar tendency to the probe measurements. The properties of Ar plasma are similar to DC-pulsed discharge, and the polarity of AC power can be possible of depositions and modifications on both conductive and insulating materials, unlike DC discharge. The a-C films, which are deposited using Ar-diluted CH4 plasma, showed a smooth surface, high transmittance (>80%), high sp3 concentration (∼40%) and wide optical band-gap (3.55 eV). Consequently, the LF power source was found to be a very simple, convenient and inexpensive tool to generate plasmas for various applications.
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Kim, H.T., Kim, CD., Pyo, M.S. et al. Electrical and optical characteristics of Ar plasma generated by low-frequency (60Hz) power source. Korean J. Chem. Eng. 31, 1892–1897 (2014). https://doi.org/10.1007/s11814-014-0145-9
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DOI: https://doi.org/10.1007/s11814-014-0145-9