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Effect of laser beam focusing point on AFM measurements

  • Materials (Organic, Inorganic, Electronic, Thin Films)
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Abstract

The optical beam deflection method, which is used in AFM to obtain surface images, may distort the resulting image. The flexible and long cantilever is easily overdamped by the laser radiation pressure, resulting in steady deflection of the cantilever (<1 nm). This deflective force distorts the image and influences the force-distance (F-D) curve. The present study investigated the effect of laser radiation pressure on image distortion. As a proof-of-concept test, two grating samples (with step heights of 150 and 18 nm for TGX01 and TGZ01, respectively) were examined with an NSC36 series cantilever in air and water media.

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References

  1. Y. Kim, S. K. Kang, I. Choi, J. Lee and J. Yi, Appl. Phys. Lett., 88, 173121 (2006).

  2. I. Choi and J. Yi, Korean J. Chem. Eng., 25, 386 (2008).

    Article  CAS  Google Scholar 

  3. Y. Kim, I. Choi, S. K. Kang, J. Lee and J. Yi, Appl. Phys. Lett., 86, 073113 (2005).

  4. Y. Kim and J. Yi, J. Phys. Chem. B, 110, 20526 (2006).

  5. J. L. Hutter and J. Bechhoefer, Rev. Sci. Instrum., 64, 1868, (1993).

    Article  CAS  Google Scholar 

  6. R. E. Jones and D. P. Hart, Tribol. Int., 38, 335 (2005).

    Google Scholar 

  7. Y. Sun and J. H. L. Pang, Nanotechnology, 17, 933 (2006).

    Article  Google Scholar 

  8. S. Pal and A. K. Ghosh, Electronic Lett., 42, 580 (2006).

    Article  Google Scholar 

  9. D. Dragoman and M. Dragoman, Appl. Opt., 38, 6773 (1996).

    Article  Google Scholar 

  10. J. Kwon, J. Honh, Y.-S. Kim, D.-Y. Lee, S. Lee and S. Park, Rev. Sci. Instrum., 74, 4378 (2003).

    Article  CAS  Google Scholar 

  11. C. Argento and R. H. French, J. Appl. Phys., 80, 6081 (1996).

    Article  CAS  Google Scholar 

  12. H. D. Ackler, R.H. French and Y.-M. Chiang, J. Colloid Interf. Sci., 179, 460 (1996).

    Article  CAS  Google Scholar 

  13. R. W. Carpick, D. F. Ogletree and M. Salmeron, J. Colloid Interf. Sci., 211, 395 (1999).

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Department of Chemical Engineering, Kwangwoon University, Seoul, 139-701, Korea

    Younghun Kim

  2. School of Chemical and Biological Engineering, Seoul National University, Seoul, 151-742, Korea

    Young In Yang, Inhee Choi & Jongheop Yi

Authors
  1. Younghun Kim
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  2. Young In Yang
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  3. Inhee Choi
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  4. Jongheop Yi
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Correspondence to Younghun Kim.

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Kim, Y., Yang, Y.I., Choi, I. et al. Effect of laser beam focusing point on AFM measurements. Korean J. Chem. Eng. 26, 496–499 (2009). https://doi.org/10.1007/s11814-009-0084-z

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  • DOI: https://doi.org/10.1007/s11814-009-0084-z

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