A lattice measuring method based on integral imaging technology

Abstract

Aiming at the problem that the lattice feature exceeds the view field of the scanning electron microscope (SEM) measuring system, a new lattice measuring method is proposed based on integral imaging technology. When the system works, the SEM measuring system is equivalent to an integral image acquisition system. Firstly, a lattice measuring method is researched based on integral imaging theory. Secondly, the system parameters are calibrated by the VLSI lattice standard. Finally, the value of the lattice standard to be tested is determined based on the calibration parameters and the lattice measuring algorithm. The experimental results show that, compared with the traditional electron microscope measurement method, the relative error of the measured value of the algorithm is maintained within 0.2%, with the same level of measurement accuracy, but it expands the field of view of the electron microscope measurement system, which is suitable for the measurement of samples under high magnification.