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Fabrication of high aspect ratio gratings for X-ray imaging

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Abstract

Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies with exposure dose, the relationship between linewidth broadening and exposure dose is studied experimentally. A series of gratings with different periods and different duty cycles are designed by optimizing the linewidth and exposure dose. Finally, the gratings are successfully fabricated by combining UV lithography and electroplating.

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Authors and Affiliations

  1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230029, China

    Shuang-yue Hou  (侯双月), Ying Xiong  (熊瑛), Shan Chen  (陈珊), Peng-hui Xiong  (熊鹏辉), Xiao-bo Zhang  (张晓波), Yang-chao Tian  (田扬超) & Gang Liu  (刘刚)

  2. Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, 230026, China

    Peng-hui Xiong  (熊鹏辉) & Xiang-yu Chen  (陈翔宇)

Authors
  1. Shuang-yue Hou  (侯双月)
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  2. Ying Xiong  (熊瑛)
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  3. Shan Chen  (陈珊)
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  4. Peng-hui Xiong  (熊鹏辉)
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  5. Xiang-yu Chen  (陈翔宇)
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  6. Xiao-bo Zhang  (张晓波)
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  7. Yang-chao Tian  (田扬超)
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  8. Gang Liu  (刘刚)
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Corresponding author

Correspondence to Gang Liu  (刘刚).

Additional information

This work has been supported by the Major State Basic Research Development Program of China (No.2012CB825804).

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Hou, Sy., Xiong, Y., Chen, S. et al. Fabrication of high aspect ratio gratings for X-ray imaging. Optoelectron. Lett. 10, 88–90 (2014). https://doi.org/10.1007/s11801-014-3220-x

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  • DOI: https://doi.org/10.1007/s11801-014-3220-x

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