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Effects of the Cr doping on structure and optical properties of ZnO thin films

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Abstract

Cr-doped ZnO thin films are prepared on glass substrates by the magnetron sputtering technique. An X-ray diffraction (XRD) is used to analyze the structural properties of the thin films. It indicates that all the thin films have a preferential c-axis orientation. The peak position of the (002) plane shifts to the higher 2θ value, and the peak intensity decreases with the increase of Cr doping. The results of the scanning electron microscopy (SEM) show that the surface morphology becomes loose with the increase of Cr doping. Besides, it is found from the photoluminescence (PL) measurement at room temperature that the ultraviolet emission peak and green emission band are located at 375 nm and 520 nm, respectively, and both intensities of them decrease with the increase of the Cr doping concentration, while the band gap of the ultraviolet emission shifts to the lower wavelength. The experimental results confirm that the optimal Cr doping concentration is 2 at. %.

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Authors and Affiliations

  1. Tianjin Key Laboratory of Film Electronic and Communication Device, Tianjin University of Technology, Tianjin, 300191, China

    Chang-feng Fu  (付长凤), Xi-ming Chen  (陈希明) & Xiaoguo Wu  (吴小国)

  2. School of Electronic Science, Daqing Petroleum Institute, Daqing, 163318, China

    Chang-feng Fu  (付长凤) & Lian-fu Han  (韩连福)

  3. School of Science, Tianjin University of Technology, Tianjin, 300191, China

    Lan Li  (李岚)

Authors
  1. Chang-feng Fu  (付长凤)
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  2. Xi-ming Chen  (陈希明)
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  3. Lan Li  (李岚)
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  4. Lian-fu Han  (韩连福)
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  5. Xiaoguo Wu  (吴小国)
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Corresponding author

Correspondence to Chang-feng Fu  (付长凤).

Additional information

This work has been supported by Tianjin Natural Science Foundation (No. 06YFJZJC00100).

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Fu, Cf., Chen, Xm., Li, L. et al. Effects of the Cr doping on structure and optical properties of ZnO thin films. Optoelectron. Lett. 6, 37–40 (2010). https://doi.org/10.1007/s11801-010-9015-9

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  • DOI: https://doi.org/10.1007/s11801-010-9015-9

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