Skip to main content
SpringerLink
Log in

Micro-optical structures formed by a mask moving method

  • Published:
Optoelectronics Letters Aims and scope Submit manuscript

Abstract

An unique mask moving method is developed for forming effective micro-optical structures with continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for binary moving mask is described. Finally some eoncrete micro-optical components with typical microstructures are presented for demonstrating the validity of the method.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Dante D’Amato and Robert Centamore, SPIE, (1991), 1544 (1991), 166.

  2. D. Kwo, G. Damas, and W. Zmek, SPIE, 1544 (1991), 66.

    Article  ADS  Google Scholar 

  3. M.E. Motamedi, Ming C. Wu, and K.S.J. Pister, Opt. Eng., 36 (1997), 1282.

    Article  ADS  Google Scholar 

  4. Reinhard Volkel, Hans Peter Herzig, and P. Nussbaum, Opt. Eng., 35 (1996), 3323.

    Article  ADS  Google Scholar 

  5. Chunlei Du, Xiaochun Dong, Chuankai Qiu Qiling Deng, and Chongxi Zhou, Optical Engineering, 43 (2004), 2595.

    Article  ADS  Google Scholar 

  6. Xiaochung Dong, Chunlei Du, Changtao Wang, Qiling Deng, Yudong Zhang, and Xiangang Luo, Applied Physics Letter, 89 (2006), 261105.

Download references

Author information

Authors and Affiliations

  1. State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China

    Du Chun-lei, Dong Xiao-chun, Deng Qi-ling & Luo Xian-gang

Authors
  1. Du Chun-lei
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Dong Xiao-chun
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Deng Qi-ling
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Luo Xian-gang
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Antrag GZ 398, Ghinesisch-Deutsches Zentrum für Wissenschaftsförderung.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Du, Cl., Dong, Xc., Deng, Ql. et al. Micro-optical structures formed by a mask moving method. Optoelectron. Lett. 3, 95–98 (2007). https://doi.org/10.1007/s11801-007-7021-3

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11801-007-7021-3

CLC number

Search

Navigation