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All-solid-state microscopic interferometer with frequency-variation and phase-shifting capability

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Abstract

A novel microscopic interferometry with ability of frequency-variation and phase-shifting is proposed for microstructures testing. By using acousto-optic technique, sequential carriers can be generated with different spatial frequencies so that the temporal phase unwrapping method can be applied for decoding the height information. Combined with phase-shifting technique realized by spatial light modulator, this method is especially suitable for interferometric measurement with high precision and large dynamic range.

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Authors and Affiliations

  1. Institute of Optoelectronics and Key laboratory of Optoelectronic Devices and Systems of Education Ministry, Shenzhen University, Shenzhen, 518060, China

    Tian Jin-dong, Zhao Xiao-bo & Peng Xiang

Authors
  1. Tian Jin-dong
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  2. Zhao Xiao-bo
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  3. Peng Xiang
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Additional information

Antrag GZ 398, Ghinesisch-Deutsches Zentrum für Wissenschaftsförderung.

This work is supported by Natural Science Foundation of China (grants 60275012), Natural Science Foundation of Guangdong province (grant 06028584), and the Research Project of Science & Technology from Shenzhen Government (Grant No.200619).

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Tian, Jd., Zhao, Xb. & Peng, X. All-solid-state microscopic interferometer with frequency-variation and phase-shifting capability. Optoelectron. Lett. 3, 123–125 (2007). https://doi.org/10.1007/s11801-007-7013-3

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  • DOI: https://doi.org/10.1007/s11801-007-7013-3

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