Abstract
To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints, a heuristic scheduling algorithm was developed. Firstly, on the basis of formulating scheduling problems domain of dual-armed cluster tools, a non-integer programming model was set up with a minimizing objective function of the makespan. Combining characteristics of residency time and reentrant constraints, a scheduling algorithm of searching the optimal operation path of dual-armed transport module was presented under many kinds of robotic scheduling paths for dual-armed cluster tools. Finally, the experiments were designed to evaluate the proposed algorithm. The results show that the proposed algorithm is feasible and efficient for obtaining an optimal scheduling solution of dual-armed cluster tools with residency time and reentrant constraints.
Similar content being viewed by others
References
ZHOU B H, PAN Q Z, WANG S J. Modeling of a photolithography process in semiconductor wafer fabrication systems using extended hybrid Petri nets [J]. Journal of Central South University of Technology, 2007, 14(3): 393–398.
PERKINSON T L, Mc LARTY P K, GYURCSIK R S, CAVIN III R K. Single-wafer cluster tool performance: an analysis of throughput [J]. IEEE Transactions on Semiconductor Manufacturing, 1994, 7(3): 369–373.
VENKATESH S, DAVENPORT R, FOXHOVEN P, NULMAN J. A steady-state throughput analysis of cluster tools: Dual-blade versus single-blade robots [J]. IEEE Transactions on Semiconductor Manufacturing, 1997, 10 (4): 418–424.
LEE H Y, LEE T E. Scheduling single-armed cluster tools with reentrant wafer flows [J]. IEEE Transactions on Semiconductor Manufacturing, 2006, 19(2): 226–240.
WU N Q, CHU F, CHU C B, ZHOU M C. Petri net-based scheduling of single-armed cluster tools with reentrant atomic layer deposition processes [J]. IEEE Transactions on Automation Science and Engineering, 2011, 8(1): 42–55.
WU N Q, CHU C B, CHU F, ZHOU M C. A Petri net method for schedulability and scheduling problems in single-armed cluster tools with wafer residency time constraints [J]. IEEE Transactions on Semiconductor Manufacturing, 2008, 21(2): 224–237.
QIAO Y, WU N Q, ZHOU M C. Real-time scheduling of single-armed cluster tools subject to residency time constraints and bounded activity time variation [J]. IEEE Transactions on Automation Science and Engineering, 2012, 9(3): 564–577.
ZHOU B H, LI X. Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints [J]. Journal of Central South University, 2012, 19(1): 187–192.
ROSTAMI S, HAMIDZADEH B. An optimal residency-aware scheduling technique for cluster tools with buffer module [J]. IEEE Transactions on Semiconductor Manufacturing, 2004, 17(1): 68–73.
SHIN Y H, LEE T E, KIM J H, LEE H Y. Modeling and implementing a real-time scheduler for dual-armed cluster tools [J]. Computers in Industry, 2001, 45(1): 13–27.
ZUBEREK W M. Cluster tools with chamber revisiting-modeling and analysis using timed Petri nets [J]. IEEE Transactions on Semiconductor Manufacturing, 2004, 17(3): 333–344.
DAWANDE M, GEISMAR H N, PINEDO M, SRISKANDARAJAH C. Throughput optimization in dual-gripper interval robotic cells [J]. IIE Transactions, 2010, 42(1): 1–15.
KIM J H, LEE T E, LEE H Y, PARK D B. Scheduling analysis of time-constrained dual-armed cluster tools [J]. IEEE Transactions on Semiconductor Manufacturing, 2003, 16(3): 521–534.
KIM D K, JUNG C Y, LEE T E, JUNG Y J. Cyclic scheduling of cluster tools with non-identical chamber access times [C]// Proceedings of the 2011 Winter Simulation Conference. Phoenix: IEEE Press, 2011: 2068–2079.
WU N Q, ZHOU M C. Schedulability analysis and optimal scheduling of dual-armed cluster tools with residency time constraint and activity time variation [J]. IEEE Transactions on Automation Science and Engineering, 2012, 9(1): 203–209.
WU N Q, ZHOU M C. Modeling, analysis and control of dual-armed cluster tools with residency time constraint and activity time variation based on Petri nets [J]. IEEE Transactions on Automation Science and Engineering, 2012, 9(2): 446–454.
JUNG C Y, LEE T E. An efficient mixed integer programming model based on timed Petri nets for diverse complex cluster tool scheduling problems [J]. IEEE Transactions on Semiconductor Manufacturing, 2012, 25(2): 186–199.
Author information
Authors and Affiliations
Corresponding author
Additional information
Foundation item: Projects(71071115; 61273035) supported by the National Natural Science Foundation of China
Rights and permissions
About this article
Cite this article
Zhou, Bh., Gao, Zs. & Chen, J. Scheduling algorithm of dual-armed cluster tools with residency time and reentrant constraints. J. Cent. South Univ. 21, 160–166 (2014). https://doi.org/10.1007/s11771-014-1927-2
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11771-014-1927-2