Skip to main content
SpringerLink
Log in

Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints

  • Published:
Journal of Central South University Aims and scope Submit manuscript

Abstract

To improve the productivity of cluster tools in semiconductor fabrications, on the basis of stating scheduling problems, a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools. Firstly, mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain. Resource conflicts were analyzed in the built scheduling model, and policies to solve resource conflicts were built. A scheduling algorithm was developed. Finally, the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations. Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. van ZANT P. Microchip fabrication: A practical guide to semiconductor processing [M]. 5th Ed. New York: McGraw-Hill, 2004: 495–496.

    Google Scholar 

  2. YI Jin-gang, DING Sheng-wei, SONG De-zhe, ZHANG Mike-tao. Steady-state throughput and scheduling analysis of multi-cluster tools: A decomposition approach [J]. IEEE Transactions on Automation Science and Engineering, 2008, 5(2): 321–336.

    Article  Google Scholar 

  3. ZHOU Bing-hai, PAN Qing-zhi, WANG Shi-jin, WU Bin. Modeling of a photolithography process in semiconductor wafer fabrication systems using extended hybrid Petri nets [J]. Journal of Central South University of Technology, 2007, 14(3): 393–398.

    Article  Google Scholar 

  4. LEE T E. A review of scheduling theory and methods for semiconductor manufacturing cluster tools [C]// Proceedings of 2008 Winter Simulation Conference. Austin, America, 2008: 2127–2135.

  5. WU Nai-qi, CHU Cheng-bin, CHU Feng, ZHOU Meng-chu. Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using petri net [C]// Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control. Sanya, China, 2008: 84–89.

  6. WU Nai-qi, ZHOU Meng-chu. Analysis of wafer sojourn time in dual-arm cluster tools with residency time constraint and activity time variation [J]. IEEE Transactions on Semiconductor Manufacturing, 2010, 23(1): 53–64.

    Article  Google Scholar 

  7. MORRISON J R. Regular flow line models for semiconductor cluster tools: A case of lot dependent process times [C]// Proceedings of the 5th Annual IEEE Conference on Automation Science and Engineering. Bangalore, India, 2009: 465–470.

  8. LEE T E, PARK S H. An extended event graph with negative places and tokens for time window constraints [J]. IEEE Transactions on Automation Science and Engineering, 2005, 2(4): 319–331.

    Article  Google Scholar 

  9. KIM J H, LEE H T, LEE H Y, PARK D B. Schedulability analysis of time-constrained cluster tools with bounded time variation by an extended Petri net [J]. IEEE Transactions on Automation Science and Engineering, 2008, 5(3): 490–503.

    Article  Google Scholar 

  10. SHIN Y H, LEE T E, KIM J H, LEE H Y. Modeling and implementing a real-time scheduler for dual-armed cluster tools [J]. Computers in Industry, 2001, 45(1): 13–27.

    Article  Google Scholar 

  11. LEE J H, LEE T E. An open scheduling architecture for cluster tools [C]// Proceedings of the 6th Annual IEEE Conference on Automation Science and Engineering. Toronto, Canada, 2010: 420–425.

  12. YIN Y. An algorithm for hoist scheduling problems [J]. International Journal of Production Research, 1994, 32(3): 501–516.

    Article  Google Scholar 

  13. CHAUVET F, PROTH J M, WARDI Y. Scheduling no-wait production with time windows and flexible processing times [J]. IEEE Transactions on Robotics and Automation, 2001, 17(1): 60–69.

    Article  Google Scholar 

  14. YOON H J, LEE D Y. Online scheduling of integrated single-wafer processing tools with temporal constraints [J]. IEEE Transactions on Semiconductor Manufacturing, 2005, 18(3): 390–398.

    Article  Google Scholar 

  15. TZENG J, LIU T, CHOU J. Applications of multi-objective evolutionary algorithms to cluster tool scheduling [C]// Proceedings of the First International Conference on Innovative Computing, Information and Control. Beijing, China, 2006: 531–534.

  16. LI Xin, ZHOU Bing-hai, LU Zhi-qiang. Scheduling algorithm for cluster tools of wafer fabrication based on events-driven [J]. Journal of Shanghai Jiaotong University, 2009, 43(6): 898–901. (in Chinese)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. School of Mechanical Engineering, Tongji University, Shanghai, 201804, China

    Bing-hai Zhou  (周炳海)

  2. Department of Systems Engineering and Engineering Management, City University of Hong Kong, Hong Kong, China

    Xin Li  (李鑫)

Authors
  1. Bing-hai Zhou  (周炳海)
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Xin Li  (李鑫)
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Bing-hai Zhou  (周炳海).

Additional information

Foundation item: Projects(71071115, 60574054) supported by the National Natural Science Foundation of China

Rights and permissions

Reprints and permissions

About this article

Cite this article

Zhou, Bh., Li, X. Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints. J. Cent. South Univ. Technol. 19, 187–192 (2012). https://doi.org/10.1007/s11771-012-0990-9

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11771-012-0990-9

Key words

Search

Navigation