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Fabrication of micro carbon pillar by laser-induced chemical vapor deposition

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Abstract

Argon ion laser was used as the induced light source and ethane (C2H4) was selected as the precursor gas, in the variety ranges of laser power from 0.5 W to 4.5 W and the pressure of the precursor gas from 225×133.3 Pa to 680×133.3 Pa, the experiments of laser induced chemical vapor deposition were proceeded for fabrication of micro carbon pillar. In the experiments, the influences of power of laser and pressure of work gas on the diameter and length of micro carbon pillar were investigated, the variety on averaged growth rate of carbon pillar with the laser irradiation time and moving speed of focus was discussed. Based on experiment data, the micro carbon pillar with an aspect ratio of over 500 was built through the method of moving the focus.

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Authors and Affiliations

  1. College of Machinery and Electrical, Centre South University of Forestry and Technology, Changsha, 410004, China

    Jian Zhou  (周 健), Li-jun Li  (李立君) & Xin-hua Li  (李新华)

  2. Institute of Rheological Mechanics and Material Engineering, Centre South University of Forestry and Technology, Changsha, 410004, China

    Yin-she Luo  (罗迎社) & Shui-ping Yin  (殷水平)

  3. Department of Teaching Affair, Centre South University of Forestry and Technology, Changsha, 410004, China

    Qi-wen Zhong  (钟琦文)

Authors
  1. Jian Zhou  (周 健)
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  2. Yin-she Luo  (罗迎社)
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  3. Li-jun Li  (李立君)
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  4. Qi-wen Zhong  (钟琦文)
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  5. Xin-hua Li  (李新华)
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  6. Shui-ping Yin  (殷水平)
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Corresponding author

Correspondence to Jian Zhou  (周 健).

Additional information

Foundation item: Project supported by Scientific Research Fund of Centre South University of Forestry and Technology; Project supported by Teaching Innovation Fund of Centre South University of Forestry and Technology

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Zhou, J., Luo, Ys., Li, Lj. et al. Fabrication of micro carbon pillar by laser-induced chemical vapor deposition. J. Cent. South Univ. Technol. 15 (Suppl 1), 197–201 (2008). https://doi.org/10.1007/s11771-008-0345-8

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  • DOI: https://doi.org/10.1007/s11771-008-0345-8

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