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Fluorinated polymer with high thermal stability for fabrication of 32-channel arrayed waveguide grating multiplexer on silicon

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Abstract

A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared absorption spectrum show that the materials have high thermal stability and high optical transparency in the infrared communication region. The refractive index of FPEEK can be controlled easily by changing the fluorine content of the materials. The 32-channel AWG multiplexer is fabricated using the FPEEK and oxygen reactive ion etching technology. The AWG multiplexer exhibits that the insertion loss is from 12.8 to 17.8 dB and the channel crosstalk is less than −20 dB. The wavelength channel spacing and the center wavelength are 0.8 nm and 1 548 nm, respectively.

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Authors and Affiliations

  1. State Key Laboratory on Integrated Optoelectronics, Jilin University Region, 130023, Changchun, China

    Wang Fei, Sun Wei, Yi Mao-bin, Liu Shi-yong & Zhang Da-ming PhD (Professor)

  2. Department of Chemistry, Jilin University, 130023, Changchun, China

    Li Ai-ze & Jiang Zhen-hua

Authors
  1. Wang Fei
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  2. Li Ai-ze
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  3. Sun Wei
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  4. Yi Mao-bin
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  5. Jiang Zhen-hua
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  6. Liu Shi-yong
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  7. Zhang Da-ming PhD
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Correspondence to Zhang Da-ming PhD.

Additional information

Foundation item: Project (60223001, 60177022) supported by the National Natural Science Foundation of China; project(2001AA312160) supported by the National High Technology Research and Development Program of China; project (TG2000036602) supported by the National Basic Research Program of China

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Wang, F., Li, Az., Sun, W. et al. Fluorinated polymer with high thermal stability for fabrication of 32-channel arrayed waveguide grating multiplexer on silicon. J Cent. South Univ. Technol. 12, 366–369 (2005). https://doi.org/10.1007/s11771-005-0162-2

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  • DOI: https://doi.org/10.1007/s11771-005-0162-2

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