Abstract
From the fluid model, the plasma is an isotropic medium. First, it is obtained that the microwave field in a cylindrical cavity filled with plasma, where the microwave comes from vacuum cylindrical waveguide. Coupling with fluid equations for the electron and ion motion, the microwave discharge courses are calculated. The results show that the curves of ion and electron density distributions are similar as the curves of electric field intensity distribution. Also, a critical electron density is exist. Above this density, microwave field will damp rapidly, this makes the gas ionization mainly happening on the surface.
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Supported by the National Natural Science Foundation of China
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Dajun, Z., Shenggang, L. The simulation for microwave plasma breakdown process. J. of Electron.(China) 14, 180–185 (1997). https://doi.org/10.1007/s11767-997-1012-6
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DOI: https://doi.org/10.1007/s11767-997-1012-6