Production Engineering

, Volume 11, Issue 3, pp 365–371 | Cite as

Distortion-free laser beam shaping for material processing using a digital micromirror device

  • Hamza MessaoudiEmail author
  • Fabian Thiemicke
  • Claas Falldorf
  • Ralf B. Bergmann
  • Frank Vollertsen
Machine Tool


Digital micromirror devices (DMD) are increasingly used in laser-based manufacturing for a maskless beam shaping in order to realize simultaneous 2D/3D material processing. Thereby, the DMD has to be irradiated under a sharp angle to achieve acceptable projection quality with negligible distortion phenomena. In this article, we present a novel setup for DMD-based laser material processing. It enables the irradiation under large angles (up to 60\(^{\circ }\)), the reduction of optical elements as well as machine size. Occurring optical distortions during the amplitude-based laser beam shaping are characterized. To eliminate these phenomena, we implement an optical modelling of the DMD patterns, taking into account the propagation through the tilted interfaces. The resulting imaging of different desired shapes is verified experimentally for its geometrical properties such as length, radius and aspect ratio. Thereby, an angle-dependent correction and high shape accuracy of the image projection is shown. This novel arrangement may have applications in direct laser writing and photochemical machining.


Laser beam shaping Binary optics Laser micro machining Maskless processing 



The authors thank the German Research Foundation (DFG) for funding the project DMD-Jet of the Priority Program SPP1476 (VO 530/48-2).


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Copyright information

© German Academic Society for Production Engineering (WGP) 2017

Authors and Affiliations

  1. 1.BIAS-Bremer Institut fuer angewandte StrahltechnikBremenGermany
  2. 2.MAPEX Center for Materials and Processes and Faculty of Physics and Electrical Engineering, Applied OpticsUniversity of BremenBremenGermany
  3. 3.Faculty of Production Engineering-Mechanical Engineering and Process EngineeringUniversity of BremenBremenGermany

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