Skip to main content
SpringerLink
Log in

Process simulation and economic analysis of reactor systems for perfluorinated compounds abatement without HF effluent

  • Research Article
  • Published:
Frontiers of Chemical Science and Engineering Aims and scope Submit manuscript

Abstract

New and efficient reactor systems were proposed to treat perfluorinated compounds via catalytic decomposition. One system has a single reactor (S-1), and another has a series of reactors (S-2). Both systems are capable of producing a valuable CaF2 and eliminating toxic HF effluent and their feasibility was studied at various temperatures with a commercial process simulator, Aspen HYSYS®. They are better than the conventional system, and S-2 is better than S-1 in terms of CaF2 production, a required heat for the system, natural gas usage and CO2 emissions in a boiler, and energy consumption. Based on process simulation results, preliminary economic analysis shows that cost savings of 12.37% and 13.55% were obtained in S-2 at 589.6 and 621.4 °C compared to S-1 at 700 and 750 °C, respectively, for the same amount of CaF2 production.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Gompel J V, Walling T. A new way to treat process exhaust to remove CF4. Semiconductor International, 1977, 20(10): 95–100

    Google Scholar 

  2. Tsai W T, Chem H P, Hsien W Y. A review of uses, environmental hazards and recovery/recycle technologies of perfluorocarbons (PFCs) emissions from the semiconductor manufacturing processes. Journal of Loss Prevention in the Process Industries, 2002, 15(2): 65–75

    Article  Google Scholar 

  3. Brown R S, Rossin J A, Thomas C J. Catalytic process for control of PFC emissions. Semiconductor International, 2001, 24(6): 209–215

    CAS  Google Scholar 

  4. Takita Y, Morita C, Ninomiya M, Wakamatsu H, Nishiguchi H, Ishihara T. Catalytic decomposition of CF4 over AlPO4-based catalysts. Chemistry Letters, 1999, 28(5): 417–418

    Article  Google Scholar 

  5. Xu X F, Jeon J Y, Choi M H, Kim H Y, Choi W C, Park Y K. A strategy to protect Al2O3-based PFC decomposition catalyst from deactivation. Chemistry Letters, 2005, 34(3): 364–365

    Article  CAS  Google Scholar 

  6. Song J, Chung S, Kim M, Seo M, Lee Y, Lee K, Kim J. The catalytic decomposition of CF4 over Ce/Al2O3 modified by a cerium sulfate precursor. Journal of Molecular Catalysis A Chemical, 2013, 370: 50–55

    Article  CAS  Google Scholar 

  7. Han W, Chen Y, Kin B, Liu H, Yu H. Catalytic hydrolysis of trifluoromethane over alumina. Greenhouse Gases. Science and Technology, 2014, 4(1): 121–130

    Article  CAS  Google Scholar 

  8. Park N, Park H, Lee T, Chang W, Kwon W. Hydrolysis and oxidation on supported phosphate catalyst for decomposition of SF6. Catalysis Today, 2012, 185(1): 247–252

    Article  CAS  Google Scholar 

  9. Lee Y C, Jeon J K. A study on catalytic process in pilot plant for abatement of PFC emission. Cleanroom Technology, 2012, 18(2): 216–220

    Article  Google Scholar 

  10. Elkanzi E M. Simulation of the process of biological removal of hydrogen sulfide from gas. In: Proceedings of the 1st Annual Gas Processing Symposium, 2009, 1: 266–275

    CAS  Google Scholar 

  11. Sunny A, Solomon P A, Aparna K. Syngas production from regasified liquefied natural gas and its simulation using Aspen HYSYS. Journal of Natural Gas Science and Engineering, 2016, 30: 176–181

    Article  CAS  Google Scholar 

  12. Kazemi A, Malayeri M, Gharibi kharaji A, Shariati A. Gharibi kharaji A, Shariati A. Feasibility study, simulation, and economical evaluation of natural gas sweetening processes–Part 1: A case study on a low capacity plant in iran. Journal of Natural Gas Science and Engineering, 2014, 20: 16–22

    Article  CAS  Google Scholar 

  13. Peters L, Hussain A, Follmann M, Melin T, Hagg M B. CO2 removal from natural gas by employing amine absorption and membrane technology–A technical and economical analysis. Chemical Engineering Journal, 2011, 172(2-3): 952–960

    Article  CAS  Google Scholar 

  14. Ahmad F, Lau K K, Shariff A M, Murshid G. Process simulation and optimal design of membrane separation system for CO2 capture from natural gas. Computers & Chemical Engineering, 2012, 36(10): 119–128

    Article  CAS  Google Scholar 

  15. Ploegmakers J, Jelsma A R T, van der Ham A G J, Nijmeijer K. Economic evaluation of membrane potential for ethylene/ethane separation in a retrofitted hybrid membrane-distillation plant using Unisim Design. Industrial & Engineering Chemistry Research, 2013, 52(19): 6524–6539

    Article  CAS  Google Scholar 

  16. Choi J, Park M, Kim J, Ko Y, Lee S, Baek I. Modelling and analysis of pre-combustion CO2 capture with membranes. Korean Journal of Chemical Engineering, 2013, 30(6): 1187–1194

    Article  CAS  Google Scholar 

  17. Marchioro Y P A, Lakew A A, Bolland O. Integration of lowtemperature transcritical CO2 Rankine cycle in natural gas-fired combined cycle (NGCC) with post-combustion CO2 capture. International Journal of Greenhouse Gas Control, 2013, 12: 213–219

    Article  CAS  Google Scholar 

  18. Park M, Kim E. Thermodynamic evaluation on the integrated system of VHTR and forward osmosis desalination process. Desalination, 2014, 337(17): 117–126

    Article  CAS  Google Scholar 

  19. Nahar G A, Madhani S S. Thermodynamics of hydrogen production by the steam reforming of butanol: Analysis of inorganic gases and light hydrocarbons. International Journal of Hydrogen Energy, 2010, 35(1): 98–109

    Article  CAS  Google Scholar 

  20. Leonzio G. Process analysis of biological Sabatier reaction for biomethane production. Chemical Engineering Journal, 2016, 290(15): 490–498

    Article  CAS  Google Scholar 

  21. Denz N, Ausberg L, Bruns M, Viere T. Supporting resource efficiency in chemical industries IT-based integration of flow sheet simulation and material flow analysis. 21st CIRP Conference on Life Cycle Engineering, 2014, 15: 537–542

    Google Scholar 

  22. Ou L, Thilakaratne R, Brown R C, Wright M M. Techno-economic analysis of transportation fuels from defatted microalgae via hydrothermal liquefaction and hydroprocessing. Biomass and Bioenergy, 2015, 72: 45–54

    Article  CAS  Google Scholar 

  23. Apostolakou A A, Kookos I K, Marazioti C, Angelopoulos K C. Techno-economic analysis of a biodiesel production process from vegetable oils. Fuel Processing Technology, 2009, 90(7-8): 1023–1031

    Article  CAS  Google Scholar 

  24. Sanchez M J G, Tsotsis T T. Catalytic membranes and membrane reactors. Weinheim: Wiley-VCH, 2002, 5–6

    Book  Google Scholar 

  25. Lim H. Hydrogen selectivity and permeance effect on the water gas shift reaction (WGSR) in a membrane reactor. Korean Journal of Chemical Engineering, 2015, 32(8): 1522–1527

    Article  CAS  Google Scholar 

  26. Turton R. Analysis, synthesis, and design of chemical processes. New Jersey: Pearson, 2013, 157–226

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Advanced Materials and Chemical Engineering, Catholic University of Daegu, Gyeongbuk, 38430, Korea

    Boreum Lee, Sunggeun Lee & Hankwon Lim

  2. Department of Environment and Energy Engineering, Chonnam National University, Gwangju, 61186, Korea

    Ho Young Jung

  3. Korea Institute of Energy Research, Daejeon, 34129, Korea

    Shin-Kun Ryi

Authors
  1. Boreum Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sunggeun Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Ho Young Jung
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Shin-Kun Ryi
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Hankwon Lim
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding authors

Correspondence to Shin-Kun Ryi or Hankwon Lim.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Lee, B., Lee, S., Jung, H.Y. et al. Process simulation and economic analysis of reactor systems for perfluorinated compounds abatement without HF effluent. Front. Chem. Sci. Eng. 10, 526–533 (2016). https://doi.org/10.1007/s11705-016-1590-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11705-016-1590-2

Keywords

Search

Navigation