Skip to main content
SpringerLink
Log in

Nanostructure of laser-deposited palladium thin films on different substrates

  • Published:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques Aims and scope Submit manuscript

Abstract

The morphological features of palladium thin films deposited on different substrates are described. Film deposition has been performed by means of the pulsed laser evaporation method. It is shown that the grain structure of palladium films is formed independently of the substrate roughness. Particular emphasis is placed on the correlation between gas-sensitive metal-insulator-semiconductor (MIS) sensor properties and the nanostructure of palladium films used as metal electrodes in these sensors. It is concluded that a change in the morphology of palladium films has no direct influence on the degradation of the hydrogen sulphide sensitivity of MIS sensors that arises after sensor annealing in air enriched with hydrogen.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Yu. A. Bykovskii, V. G. Degtyarev, et al., Zh. Tekh. Fiz. 42, 658 (1972) [Tech. Phys. 17, 517 (1972)].

    Google Scholar 

  2. S. B. Gaponov, B. M. Luskin, B. A. Nesterov, and N. N. Salashchenko, Fiz. Tverd. Tela 19 (10), 2964 (1977) [Sov. Phys. Solid State 19, 1736 (1977)].

    Google Scholar 

  3. E. V. Zhovannik, I. N. Nikolaev, D. G. Stavkin, and Yu. A. Utochkin, Fiz. Khim. Obrab. Mater. 6, 72 (1996).

    Google Scholar 

  4. S. G. Hansen and T. E. Robitaille, Appl. Phys. Lett. 52 (1), 81 (1988).

    Google Scholar 

  5. R. Dietz, Th. Holz, D. Weißbach, and R. Scholz, Appl. Surf. Sci. 197–198, 169 (2002).

  6. J. I. Sohn, C. Nam, and S. Lee, Appl. Surf. Sci. 197–198, 568 (2002).

  7. I. N. Nikolaev, E. V. Emelin, and A. V. Litvinov, Datchiki Sistemy 7, 66 (2006).

    Google Scholar 

  8. I. N. Nikolaev and A. V. Litvinov, Izmerit. Tekhnika 8, 41 (2005).

    Google Scholar 

  9. N. Joshi, D. K. Aswal, A. K. Debnath, et al., Appl. Surf. Sci. 228, 302 (2004).

  10. E. V. Zhovannik, V. S. Kulikauskas, and I. N. Nikolaev, Fiz. Khim. Obrab. Mater. 5, 48 (1998).

    Google Scholar 

  11. I. N. Nikolaev and A. V. Litvinov, Datchiki Sistemy 8, 42 (2005).

    Google Scholar 

  12. M. Eriksson, L. Olsson, U. Helmersson, et al., Thin Solid Films 342, 297 (1999).

  13. M. Löfdahl, C. Utaiwasin, A. Carlsson, et al., Sens. Actuators B 80, 183 (2001).

Download references

Author information

Authors and Affiliations

  1. Moscow Engineering Physics Institute, Moscow, Russia

    I. N. Nikolaev & R. R. Galiev

Authors
  1. I. N. Nikolaev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. R. R. Galiev
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Original Russian Text © I.N. Nikolaev, R.R. Galiev, 2008, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 2, pp. 21–26.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Nikolaev, I.N., Galiev, R.R. Nanostructure of laser-deposited palladium thin films on different substrates. J. Surf. Investig. 2, 98–103 (2008). https://doi.org/10.1007/s11700-008-1014-0

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11700-008-1014-0

Keywords

Search

Navigation