Mechanical and optical properties of SiO2 thin films deposited on glass
The optical and mechanical properties of amorphous SiO2 films deposited on soda-lime silicate float glass by reactive RF magnetron sputtering at room temperature were investigated in dependence of the process pressure. The densities of the films are strongly influenced by the process pressure and vary between 2.38 and 1.91 g cm−3 as the pressure changes from 0.27 to 1.33 Pa. The refractive indices of the films shift between 1.52 and 1.37, while the residual compressive stresses in the deposited films vary in the range from 440 to 1 MPa. Hardness and reduced elastic modulus values follow the same trend and decline with the increase of process pressure from 8.5 to 2.2 GPa and from 73.7 to 30.9 GPa, respectively. The abrasive wear resistance decreases with the density of the films.
KeywordsSiO2 films Glass Mechanical properties Refractive index Residual stress
This work was supported by the Operational Programme Research, Development, and Education-European Regional Development Fund, project No. CZ.02.1.01/0.0/0.0/16_013/0001403 of the Ministry of Education, Youth and Sports of the Czech Republic. JS acknowledges the support from the European Regional Development Fund OPPK (CZ.2.16/3.1.00/21545).
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